Matches in SemOpenAlex for { <https://semopenalex.org/work/W2325100909> ?p ?o ?g. }
Showing items 1 to 59 of
59
with 100 items per page.
- W2325100909 endingPage "100" @default.
- W2325100909 startingPage "97" @default.
- W2325100909 abstract "A study is presented of measurement for flatness by fitting partial shape deviations to large discrete flatness deviations calcurated by two-dimentional least square serial point method. In this paper, two methods are proposed. One is the method that uses the optical interferometer as the measuring head, and is applied with 2 DLS 3 PM. The other is the method which uses four displacement sensors as the measuring head, and is applied with 2 DLS 2 PM. The following fact is revealed by the experiment. The results of measurement by these two methods corresponded with accuracy of 0.05 μm (2σ). The accuracy is achieved to 1/20 movement errors of X-Y table used in this experiment." @default.
- W2325100909 created "2016-06-24" @default.
- W2325100909 creator A5015891504 @default.
- W2325100909 date "1994-01-01" @default.
- W2325100909 modified "2023-09-26" @default.
- W2325100909 title "Measurement of Flatness by Fitting Partial Shape Deviations." @default.
- W2325100909 doi "https://doi.org/10.2493/jjspe.60.97" @default.
- W2325100909 hasPublicationYear "1994" @default.
- W2325100909 type Work @default.
- W2325100909 sameAs 2325100909 @default.
- W2325100909 citedByCount "0" @default.
- W2325100909 crossrefType "journal-article" @default.
- W2325100909 hasAuthorship W2325100909A5015891504 @default.
- W2325100909 hasBestOaLocation W23251009091 @default.
- W2325100909 hasConcept C105795698 @default.
- W2325100909 hasConcept C107551265 @default.
- W2325100909 hasConcept C120665830 @default.
- W2325100909 hasConcept C121332964 @default.
- W2325100909 hasConcept C15744967 @default.
- W2325100909 hasConcept C166689943 @default.
- W2325100909 hasConcept C202799725 @default.
- W2325100909 hasConcept C26405456 @default.
- W2325100909 hasConcept C2778530986 @default.
- W2325100909 hasConcept C33923547 @default.
- W2325100909 hasConcept C542102704 @default.
- W2325100909 hasConcept C62520636 @default.
- W2325100909 hasConceptScore W2325100909C105795698 @default.
- W2325100909 hasConceptScore W2325100909C107551265 @default.
- W2325100909 hasConceptScore W2325100909C120665830 @default.
- W2325100909 hasConceptScore W2325100909C121332964 @default.
- W2325100909 hasConceptScore W2325100909C15744967 @default.
- W2325100909 hasConceptScore W2325100909C166689943 @default.
- W2325100909 hasConceptScore W2325100909C202799725 @default.
- W2325100909 hasConceptScore W2325100909C26405456 @default.
- W2325100909 hasConceptScore W2325100909C2778530986 @default.
- W2325100909 hasConceptScore W2325100909C33923547 @default.
- W2325100909 hasConceptScore W2325100909C542102704 @default.
- W2325100909 hasConceptScore W2325100909C62520636 @default.
- W2325100909 hasIssue "1" @default.
- W2325100909 hasLocation W23251009091 @default.
- W2325100909 hasOpenAccess W2325100909 @default.
- W2325100909 hasPrimaryLocation W23251009091 @default.
- W2325100909 hasRelatedWork W1651377185 @default.
- W2325100909 hasRelatedWork W1833571962 @default.
- W2325100909 hasRelatedWork W1975544657 @default.
- W2325100909 hasRelatedWork W1997912556 @default.
- W2325100909 hasRelatedWork W2013536020 @default.
- W2325100909 hasRelatedWork W2045381340 @default.
- W2325100909 hasRelatedWork W2051133509 @default.
- W2325100909 hasRelatedWork W2070363531 @default.
- W2325100909 hasRelatedWork W2152663725 @default.
- W2325100909 hasRelatedWork W2940977922 @default.
- W2325100909 hasVolume "60" @default.
- W2325100909 isParatext "false" @default.
- W2325100909 isRetracted "false" @default.
- W2325100909 magId "2325100909" @default.
- W2325100909 workType "article" @default.