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- W2326098861 abstract "We present a process for deep dry etching of InP for vertical, facet-quality sidewalls by RIE for etch depths as high as 5.8µm. Sidewall roughness is estimated to be a few nm." @default.
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- W2326098861 date "2001-01-01" @default.
- W2326098861 modified "2023-09-24" @default.
- W2326098861 title "Deep dry etching of InP with Ti-SiO2 bi-level mask in methane-hydrogen-argon for photonics applications" @default.
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- W2326098861 doi "https://doi.org/10.1364/ipr.2001.iwb4" @default.
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