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- W2326179568 endingPage "492" @default.
- W2326179568 startingPage "485" @default.
- W2326179568 abstract "The etching characteristics such as etch rates of various materials, discharge conditions, resistivities of photoresists to plasma and etching profiles are investigated experimentally. Also etching of fine pattern is performed. The results obtained are as follows;1) The etch rate is dependent on the pressure in a chamber. The pressure which gives maximum etch rate is affected by etching gas, RF power and exciting method of plasma. The etch rate is ruled by supply of excited atoms contributed to etching.2) The surface area A of sample effects on etch rate V. The relation between V and A in most materials is written as V-A1.3=constant.3) The etching profile obtained in experiments is similar to the profile obtained analytically.4) The feature of profile is dependent on mask coefficients k (shrinking rate of etching mask/etch rate of etched materials). High etch-factor is performed in the case of k≤ 1(Ti, Ta, Si, Mo), while SiO2(k≤1)can be etched only to taper etching pattern." @default.
- W2326179568 created "2016-06-24" @default.
- W2326179568 creator A5064000180 @default.
- W2326179568 date "1976-01-01" @default.
- W2326179568 modified "2023-10-18" @default.
- W2326179568 title "FINE PATTERN FABRICATION USING FREON GAS PLASMA ETCHING" @default.
- W2326179568 doi "https://doi.org/10.2493/jjspe1933.42.485" @default.
- W2326179568 hasPublicationYear "1976" @default.
- W2326179568 type Work @default.
- W2326179568 sameAs 2326179568 @default.
- W2326179568 citedByCount "1" @default.
- W2326179568 crossrefType "journal-article" @default.
- W2326179568 hasAuthorship W2326179568A5064000180 @default.
- W2326179568 hasBestOaLocation W23261795681 @default.
- W2326179568 hasConcept C100460472 @default.
- W2326179568 hasConcept C107187091 @default.
- W2326179568 hasConcept C113196181 @default.
- W2326179568 hasConcept C121332964 @default.
- W2326179568 hasConcept C127413603 @default.
- W2326179568 hasConcept C1291036 @default.
- W2326179568 hasConcept C130472188 @default.
- W2326179568 hasConcept C136525101 @default.
- W2326179568 hasConcept C142724271 @default.
- W2326179568 hasConcept C159985019 @default.
- W2326179568 hasConcept C178790620 @default.
- W2326179568 hasConcept C185592680 @default.
- W2326179568 hasConcept C191897082 @default.
- W2326179568 hasConcept C192562407 @default.
- W2326179568 hasConcept C204787440 @default.
- W2326179568 hasConcept C2777859621 @default.
- W2326179568 hasConcept C2779227376 @default.
- W2326179568 hasConcept C2987918405 @default.
- W2326179568 hasConcept C43617362 @default.
- W2326179568 hasConcept C62520636 @default.
- W2326179568 hasConcept C64980472 @default.
- W2326179568 hasConcept C71924100 @default.
- W2326179568 hasConcept C78762247 @default.
- W2326179568 hasConcept C81626474 @default.
- W2326179568 hasConcept C82706917 @default.
- W2326179568 hasConceptScore W2326179568C100460472 @default.
- W2326179568 hasConceptScore W2326179568C107187091 @default.
- W2326179568 hasConceptScore W2326179568C113196181 @default.
- W2326179568 hasConceptScore W2326179568C121332964 @default.
- W2326179568 hasConceptScore W2326179568C127413603 @default.
- W2326179568 hasConceptScore W2326179568C1291036 @default.
- W2326179568 hasConceptScore W2326179568C130472188 @default.
- W2326179568 hasConceptScore W2326179568C136525101 @default.
- W2326179568 hasConceptScore W2326179568C142724271 @default.
- W2326179568 hasConceptScore W2326179568C159985019 @default.
- W2326179568 hasConceptScore W2326179568C178790620 @default.
- W2326179568 hasConceptScore W2326179568C185592680 @default.
- W2326179568 hasConceptScore W2326179568C191897082 @default.
- W2326179568 hasConceptScore W2326179568C192562407 @default.
- W2326179568 hasConceptScore W2326179568C204787440 @default.
- W2326179568 hasConceptScore W2326179568C2777859621 @default.
- W2326179568 hasConceptScore W2326179568C2779227376 @default.
- W2326179568 hasConceptScore W2326179568C2987918405 @default.
- W2326179568 hasConceptScore W2326179568C43617362 @default.
- W2326179568 hasConceptScore W2326179568C62520636 @default.
- W2326179568 hasConceptScore W2326179568C64980472 @default.
- W2326179568 hasConceptScore W2326179568C71924100 @default.
- W2326179568 hasConceptScore W2326179568C78762247 @default.
- W2326179568 hasConceptScore W2326179568C81626474 @default.
- W2326179568 hasConceptScore W2326179568C82706917 @default.
- W2326179568 hasIssue "497" @default.
- W2326179568 hasLocation W23261795681 @default.
- W2326179568 hasOpenAccess W2326179568 @default.
- W2326179568 hasPrimaryLocation W23261795681 @default.
- W2326179568 hasRelatedWork W1505483865 @default.
- W2326179568 hasRelatedWork W1963646017 @default.
- W2326179568 hasRelatedWork W1989313424 @default.
- W2326179568 hasRelatedWork W2003858316 @default.
- W2326179568 hasRelatedWork W2007369860 @default.
- W2326179568 hasRelatedWork W2118045353 @default.
- W2326179568 hasRelatedWork W2141646359 @default.
- W2326179568 hasRelatedWork W2326179568 @default.
- W2326179568 hasRelatedWork W2385387985 @default.
- W2326179568 hasRelatedWork W2980629914 @default.
- W2326179568 hasVolume "42" @default.
- W2326179568 isParatext "false" @default.
- W2326179568 isRetracted "false" @default.
- W2326179568 magId "2326179568" @default.
- W2326179568 workType "article" @default.