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- W2326749265 abstract "We developed computer-controlled figuring system having controllability of removal depth with nanometer level accuracy and spatial resolution close to 0.1 mm. In the system, Elastic Emission Machining (EEM) using nozzle type head and Microstitching Interferometry (MSI) are employed as a machining method and a figure measurement method. In EEM, the very small stationary machining spots are obtained, selecting small circle nozzle aperture of a 0.15 mm diameter. In this study we demonstrated computer controlled figuring, focusing on removal of high frequency figurer error, in the course of the fabrication of hard X-ray focusing mirror. Figure accuracy of 0. 2nm (RMS) is achieved at cross-sectional line profile with a length of 90nm. The fabricated X-ray mirror is evaluated at 1km-long beamline of SPring-8. Low background noise around main peak in the focused beam and improvement of image quality in the diverging beam are observed." @default.
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- W2326749265 date "2010-01-01" @default.
- W2326749265 modified "2023-09-23" @default.
- W2326749265 title "Development of nanometer level accurate computer-controlled figuring with high spatial resolution and its application to hard X-ray focusing mirror" @default.
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- W2326749265 doi "https://doi.org/10.2493/jjspe.76.338" @default.
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