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- W2328074949 abstract "*† ‡ ‡ This paper presents the development of a micromachined piezoelectric microphone for aeroacoustic measurement applications. The microphone consists of a circular diaphragm of silicon possessing a thin annular ring of piezoelectric material deposited at the edge of the diaphragm. The microphone was designed by combining a linear piezoelectric composite plate model with a lumped-element, electroacoustic model. Experimental characterization indicates a" @default.
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- W2328074949 date "2005-05-23" @default.
- W2328074949 modified "2023-09-29" @default.
- W2328074949 title "Design and Characterization of a Micromachined Piezoelectric Microphone" @default.
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- W2328074949 doi "https://doi.org/10.2514/6.2005-2998" @default.
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