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- W2328352701 abstract "Amorphous boron carbonitride films, B (C, N), were coated on a mirrorlike polished Si (111) substrates at 600°C when an r.f. power changed from 100 to 400 W. The mixture gas of NH3, C2H2 and B was used as reactive gases.The critical load to exfoliate film from a substrate linearly increased with the r.f. power.The chemical bonds of B-C, B-N and C-N in the film were observed to have promoted under plasma. Silicon carbide was formed at the interface. The film became hard and adhesive with increasing of r.f. power due to the formation of carbide." @default.
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- W2328352701 date "1998-01-01" @default.
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- W2328352701 title "Mechanical Properties of B(C,N) Thin Film by Plasma-assisted Chemical Vapor Deposition." @default.
- W2328352701 doi "https://doi.org/10.3131/jvsj.41.292" @default.
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