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- W2328440492 abstract "This article describes the recent remarks in the technology field of micromagnetic devices and micromagnetic actuators. The technology bases of these devices include material development, process technology, device design technology and high-density packaging technology. The fabrication techniques are most important for realizing these devices. LIGA process andanodic oxidation process for thick metallic structure are explained." @default.
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- W2328440492 date "1995-01-01" @default.
- W2328440492 modified "2023-09-25" @default.
- W2328440492 title "Micromagnetic Devices Fabricated by Micromachining Techniques." @default.
- W2328440492 doi "https://doi.org/10.2497/jjspm.42.1145" @default.
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