FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2328545421> ?p ?o ?g. }

• W2328545421 endingPage "3748" @default.
• W2328545421 startingPage "3741" @default.
• W2328545421 abstract "High throughput spatial atomic layer deposition (ALD) often uses higher reactor pressure than typical batch processes, but the specific effects of pressure on species transport and reaction rates are not fully understood. For aluminum oxide (Al2O3) ALD, water or ozone can be used as oxygen sources, but how reaction pressure influences deposition using ozone has not previously been reported. This work describes the effect of deposition pressure, between ∼2 and 760 Torr, on ALD Al2O3 using TMA and ozone. Similar to reports for pressure dependence during TMA/water ALD, surface reaction saturation studies show self-limiting growth at low and high pressure across a reasonable temperature range. Higher pressure tends to increase the growth per cycle, especially at lower gas velocities and temperatures. However, growth saturation at high pressure requires longer O3 dose times per cycle. Results are consistent with a model of ozone decomposition kinetics versus pressure and temperature. Quartz crystal microbalance (QCM) results confirm the trends in growth rate and indicate that the surface reaction mechanisms for Al2O3 growth using ozone are similar under low and high total pressure, including expected trends in the reaction mechanism at different temperatures." @default.
• W2328545421 created "2016-06-24" @default.
• W2328545421 creator A5023216410 @default.
• W2328545421 creator A5024328104 @default.
• W2328545421 creator A5086449780 @default.
• W2328545421 date "2014-03-25" @default.
• W2328545421 modified "2023-09-24" @default.
• W2328545421 title "Atmospheric Pressure Atomic Layer Deposition of Al₂O₃ Using Trimethyl Aluminum and Ozone" @default.
• W2328545421 cites W1608778752 @default.
• W2328545421 cites W1963550018 @default.
• W2328545421 cites W1969224115 @default.
• W2328545421 cites W1978389691 @default.
• W2328545421 cites W1984522603 @default.
• W2328545421 cites W1998534931 @default.
• W2328545421 cites W2009755636 @default.
• W2328545421 cites W2010006460 @default.
• W2328545421 cites W2013703620 @default.
• W2328545421 cites W2039108337 @default.
• W2328545421 cites W2051013122 @default.
• W2328545421 cites W2051703512 @default.
• W2328545421 cites W2058647044 @default.
• W2328545421 cites W2073552876 @default.
• W2328545421 cites W2076306638 @default.
• W2328545421 cites W2078805106 @default.
• W2328545421 cites W2080092022 @default.
• W2328545421 cites W2085907778 @default.
• W2328545421 cites W2086885272 @default.
• W2328545421 cites W2089446744 @default.
• W2328545421 cites W2122848454 @default.
• W2328545421 cites W2128659391 @default.
• W2328545421 cites W2145578865 @default.
• W2328545421 cites W2151212164 @default.
• W2328545421 cites W2154322410 @default.
• W2328545421 cites W2170325950 @default.
• W2328545421 cites W2317582529 @default.
• W2328545421 cites W2470357878 @default.
• W2328545421 cites W375432759 @default.
• W2328545421 doi "https://doi.org/10.1021/la500796r" @default.
• W2328545421 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/24617608" @default.
• W2328545421 hasPublicationYear "2014" @default.
• W2328545421 type Work @default.
• W2328545421 sameAs 2328545421 @default.
• W2328545421 citedByCount "33" @default.
• W2328545421 countsByYear W23285454212014 @default.
• W2328545421 countsByYear W23285454212015 @default.
• W2328545421 countsByYear W23285454212016 @default.
• W2328545421 countsByYear W23285454212017 @default.
• W2328545421 countsByYear W23285454212018 @default.
• W2328545421 countsByYear W23285454212019 @default.
• W2328545421 countsByYear W23285454212020 @default.
• W2328545421 countsByYear W23285454212022 @default.
• W2328545421 countsByYear W23285454212023 @default.
• W2328545421 crossrefType "journal-article" @default.
• W2328545421 hasAuthorship W2328545421A5023216410 @default.
• W2328545421 hasAuthorship W2328545421A5024328104 @default.
• W2328545421 hasAuthorship W2328545421A5086449780 @default.
• W2328545421 hasConcept C107872376 @default.
• W2328545421 hasConcept C113196181 @default.
• W2328545421 hasConcept C114614502 @default.
• W2328545421 hasConcept C121332964 @default.
• W2328545421 hasConcept C124681953 @default.
• W2328545421 hasConcept C147789679 @default.
• W2328545421 hasConcept C148898269 @default.
• W2328545421 hasConcept C150394285 @default.
• W2328545421 hasConcept C151730666 @default.
• W2328545421 hasConcept C153294291 @default.
• W2328545421 hasConcept C161790260 @default.
• W2328545421 hasConcept C175113610 @default.
• W2328545421 hasConcept C178790620 @default.
• W2328545421 hasConcept C185592680 @default.
• W2328545421 hasConcept C200239111 @default.
• W2328545421 hasConcept C2779227376 @default.
• W2328545421 hasConcept C2816523 @default.
• W2328545421 hasConcept C30646810 @default.
• W2328545421 hasConcept C33923547 @default.
• W2328545421 hasConcept C36663273 @default.
• W2328545421 hasConcept C508106653 @default.
• W2328545421 hasConcept C513153333 @default.
• W2328545421 hasConcept C540031477 @default.
• W2328545421 hasConcept C62520636 @default.
• W2328545421 hasConcept C64297162 @default.
• W2328545421 hasConcept C69544855 @default.
• W2328545421 hasConcept C86803240 @default.
• W2328545421 hasConcept C97355855 @default.
• W2328545421 hasConcept C9930424 @default.
• W2328545421 hasConcept C9996572 @default.
• W2328545421 hasConceptScore W2328545421C107872376 @default.
• W2328545421 hasConceptScore W2328545421C113196181 @default.
• W2328545421 hasConceptScore W2328545421C114614502 @default.
• W2328545421 hasConceptScore W2328545421C121332964 @default.
• W2328545421 hasConceptScore W2328545421C124681953 @default.
• W2328545421 hasConceptScore W2328545421C147789679 @default.
• W2328545421 hasConceptScore W2328545421C148898269 @default.
• W2328545421 hasConceptScore W2328545421C150394285 @default.
• W2328545421 hasConceptScore W2328545421C151730666 @default.
• W2328545421 hasConceptScore W2328545421C153294291 @default.
• W2328545421 hasConceptScore W2328545421C161790260 @default.
• W2328545421 hasConceptScore W2328545421C175113610 @default.

• next