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• W2328847882 abstract "We investigated the formation of metal and dielectric liners in via holes. We obtained a conformal deposition of the Ag metal and PVPh liners in Si deep via holes. The measured Ag liner thickness increased from 0.18 μ mt o 1.44μm as the radius of the via hole was increased from 0.85 μ mt o 5μm. We also obtained a conformal deposition of the PVPh dielectric liner of about 830 nm in thickness in 10 μm deep via holes. The Ag metal and PVPh dielectric liners had uniform thickness on every region of their respective deep via holes." @default.
• W2328847882 created "2016-06-24" @default.
• W2328847882 creator A5015050391 @default.
• W2328847882 creator A5015719324 @default.
• W2328847882 creator A5021944382 @default.
• W2328847882 creator A5022357313 @default.
• W2328847882 creator A5031412337 @default.
• W2328847882 creator A5033587444 @default.
• W2328847882 creator A5046574035 @default.
• W2328847882 creator A5050387626 @default.
• W2328847882 date "2012-01-01" @default.
• W2328847882 modified "2023-09-26" @default.
• W2328847882 title "Metal∕Dielectric Liner Formation by a Simple Solution Process for through Silicon via Interconnection" @default.
• W2328847882 cites W1986401526 @default.
• W2328847882 cites W1987224504 @default.
• W2328847882 cites W1994218814 @default.
• W2328847882 cites W2001628712 @default.
• W2328847882 cites W2022454657 @default.
• W2328847882 cites W2029530099 @default.
• W2328847882 cites W2054387757 @default.
• W2328847882 cites W2073252592 @default.
• W2328847882 cites W2084745889 @default.
• W2328847882 cites W2143049777 @default.
• W2328847882 cites W2150707051 @default.
• W2328847882 cites W2167242356 @default.
• W2328847882 doi "https://doi.org/10.1149/2.esl113678" @default.
• W2328847882 hasPublicationYear "2012" @default.
• W2328847882 type Work @default.
• W2328847882 sameAs 2328847882 @default.
• W2328847882 citedByCount "1" @default.
• W2328847882 countsByYear W23288478822020 @default.
• W2328847882 crossrefType "journal-article" @default.
• W2328847882 hasAuthorship W2328847882A5015050391 @default.
• W2328847882 hasAuthorship W2328847882A5015719324 @default.
• W2328847882 hasAuthorship W2328847882A5021944382 @default.
• W2328847882 hasAuthorship W2328847882A5022357313 @default.
• W2328847882 hasAuthorship W2328847882A5031412337 @default.
• W2328847882 hasAuthorship W2328847882A5033587444 @default.
• W2328847882 hasAuthorship W2328847882A5046574035 @default.
• W2328847882 hasAuthorship W2328847882A5050387626 @default.
• W2328847882 hasConcept C123745756 @default.
• W2328847882 hasConcept C133386390 @default.
• W2328847882 hasConcept C151730666 @default.
• W2328847882 hasConcept C159985019 @default.
• W2328847882 hasConcept C178635117 @default.
• W2328847882 hasConcept C191897082 @default.
• W2328847882 hasConcept C192562407 @default.
• W2328847882 hasConcept C2524010 @default.
• W2328847882 hasConcept C2816523 @default.
• W2328847882 hasConcept C31258907 @default.
• W2328847882 hasConcept C33923547 @default.
• W2328847882 hasConcept C38652104 @default.
• W2328847882 hasConcept C41008148 @default.
• W2328847882 hasConcept C49040817 @default.
• W2328847882 hasConcept C544153396 @default.
• W2328847882 hasConcept C544956773 @default.
• W2328847882 hasConcept C64297162 @default.
• W2328847882 hasConcept C86803240 @default.
• W2328847882 hasConcept C98214594 @default.
• W2328847882 hasConceptScore W2328847882C123745756 @default.
• W2328847882 hasConceptScore W2328847882C133386390 @default.
• W2328847882 hasConceptScore W2328847882C151730666 @default.
• W2328847882 hasConceptScore W2328847882C159985019 @default.
• W2328847882 hasConceptScore W2328847882C178635117 @default.
• W2328847882 hasConceptScore W2328847882C191897082 @default.
• W2328847882 hasConceptScore W2328847882C192562407 @default.
• W2328847882 hasConceptScore W2328847882C2524010 @default.
• W2328847882 hasConceptScore W2328847882C2816523 @default.
• W2328847882 hasConceptScore W2328847882C31258907 @default.
• W2328847882 hasConceptScore W2328847882C33923547 @default.
• W2328847882 hasConceptScore W2328847882C38652104 @default.
• W2328847882 hasConceptScore W2328847882C41008148 @default.
• W2328847882 hasConceptScore W2328847882C49040817 @default.
• W2328847882 hasConceptScore W2328847882C544153396 @default.
• W2328847882 hasConceptScore W2328847882C544956773 @default.
• W2328847882 hasConceptScore W2328847882C64297162 @default.
• W2328847882 hasConceptScore W2328847882C86803240 @default.
• W2328847882 hasConceptScore W2328847882C98214594 @default.
• W2328847882 hasLocation W23288478821 @default.
• W2328847882 hasOpenAccess W2328847882 @default.
• W2328847882 hasPrimaryLocation W23288478821 @default.
• W2328847882 hasRelatedWork W1022573775 @default.
• W2328847882 hasRelatedWork W2198091389 @default.
• W2328847882 hasRelatedWork W2210260196 @default.
• W2328847882 hasRelatedWork W2222538268 @default.
• W2328847882 hasRelatedWork W2248263204 @default.
• W2328847882 hasRelatedWork W2603323911 @default.
• W2328847882 hasRelatedWork W2780886328 @default.
• W2328847882 hasRelatedWork W2801823193 @default.
• W2328847882 hasRelatedWork W2814113630 @default.
• W2328847882 hasRelatedWork W2814856232 @default.
• W2328847882 hasRelatedWork W2827996110 @default.
• W2328847882 hasRelatedWork W2848989922 @default.
• W2328847882 hasRelatedWork W2867142569 @default.
• W2328847882 hasRelatedWork W2872174960 @default.
• W2328847882 hasRelatedWork W2882535616 @default.
• W2328847882 hasRelatedWork W292984588 @default.
• W2328847882 hasRelatedWork W2940673408 @default.
• W2328847882 hasRelatedWork W2992241003 @default.
• W2328847882 hasRelatedWork W3063379706 @default.

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