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- W2330447589 abstract "Metal impurities dissolved in silicon can cause “recombination centers”, which degrade retention characteristics of DRAMs, produce dark current in CMOS image sensors, and cause leakage of current in high-voltage transistors. In consideration of these problems, methods of controlling metallic contamination (including the removal, prevention, and gettering) in advanced ULSI manufacturing are reviewed. In particular, for controlling yield of the devices, the better understanding of the behavior and electrical activities of metal impurities diffusing in and penetrating into silicon is important. The gettering design based on the physical properties of metal species is also proposed." @default.
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- W2330447589 date "2016-01-01" @default.
- W2330447589 modified "2023-09-25" @default.
- W2330447589 title "Controlling Metallic Contamination in Advanced ULSI Processing" @default.
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- W2330447589 doi "https://doi.org/10.1380/jsssj.37.110" @default.
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