Matches in SemOpenAlex for { <https://semopenalex.org/work/W2330638307> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2330638307 endingPage "1506" @default.
- W2330638307 startingPage "1506" @default.
- W2330638307 abstract "Aluminum oxyfluoride films were deposited by a combined HIPIMS/CFUBMS deposition technique with Al targets at room temperature. In order to obtain better optical and mechanical properties, films were investigated under different duty cycles and CF4 gas flow rates. The optical properties in deep ultraviolet range, microstructure, surface roughness, and crystalline structure of aluminum oxyfluoride films have been studied. The aluminum oxyfluoride films deposited with 45/255 duty cycle and 0.8 sccm CF4 had the lowest extinction coefficient (8 × 10−4) and the highest refractive index (1.72) at 193 nm. Additionally, aluminum oxyfluoride films revealed a dense and amorphous structure with 0.155 nm surface roughness." @default.
- W2330638307 created "2016-06-24" @default.
- W2330638307 creator A5008427522 @default.
- W2330638307 creator A5042106169 @default.
- W2330638307 creator A5050233636 @default.
- W2330638307 date "2016-04-06" @default.
- W2330638307 modified "2023-09-23" @default.
- W2330638307 title "Aluminum oxyfluoride films for deep ultraviolet optics deposited by a combined HIPIMS/CFUBMS deposition technique" @default.
- W2330638307 cites W1965490201 @default.
- W2330638307 cites W1983960271 @default.
- W2330638307 cites W1985979106 @default.
- W2330638307 cites W2002994070 @default.
- W2330638307 cites W2008331545 @default.
- W2330638307 cites W2014946732 @default.
- W2330638307 cites W2019252769 @default.
- W2330638307 cites W2034487050 @default.
- W2330638307 cites W2034761257 @default.
- W2330638307 cites W2035372902 @default.
- W2330638307 cites W2046994443 @default.
- W2330638307 cites W2059144383 @default.
- W2330638307 cites W2064040529 @default.
- W2330638307 cites W2072625023 @default.
- W2330638307 cites W2135066823 @default.
- W2330638307 cites W2137949171 @default.
- W2330638307 cites W2166243160 @default.
- W2330638307 cites W27613808 @default.
- W2330638307 cites W2886690084 @default.
- W2330638307 doi "https://doi.org/10.1364/ome.6.001506" @default.
- W2330638307 hasPublicationYear "2016" @default.
- W2330638307 type Work @default.
- W2330638307 sameAs 2330638307 @default.
- W2330638307 citedByCount "5" @default.
- W2330638307 countsByYear W23306383072019 @default.
- W2330638307 countsByYear W23306383072020 @default.
- W2330638307 countsByYear W23306383072021 @default.
- W2330638307 crossrefType "journal-article" @default.
- W2330638307 hasAuthorship W2330638307A5008427522 @default.
- W2330638307 hasAuthorship W2330638307A5042106169 @default.
- W2330638307 hasAuthorship W2330638307A5050233636 @default.
- W2330638307 hasBestOaLocation W23306383071 @default.
- W2330638307 hasConcept C120665830 @default.
- W2330638307 hasConcept C121332964 @default.
- W2330638307 hasConcept C151730666 @default.
- W2330638307 hasConcept C171250308 @default.
- W2330638307 hasConcept C19067145 @default.
- W2330638307 hasConcept C191897082 @default.
- W2330638307 hasConcept C192562407 @default.
- W2330638307 hasConcept C22423302 @default.
- W2330638307 hasConcept C2776798109 @default.
- W2330638307 hasConcept C2816523 @default.
- W2330638307 hasConcept C49040817 @default.
- W2330638307 hasConcept C513153333 @default.
- W2330638307 hasConcept C51576277 @default.
- W2330638307 hasConcept C61427134 @default.
- W2330638307 hasConcept C64297162 @default.
- W2330638307 hasConcept C71597924 @default.
- W2330638307 hasConcept C86803240 @default.
- W2330638307 hasConcept C97892325 @default.
- W2330638307 hasConceptScore W2330638307C120665830 @default.
- W2330638307 hasConceptScore W2330638307C121332964 @default.
- W2330638307 hasConceptScore W2330638307C151730666 @default.
- W2330638307 hasConceptScore W2330638307C171250308 @default.
- W2330638307 hasConceptScore W2330638307C19067145 @default.
- W2330638307 hasConceptScore W2330638307C191897082 @default.
- W2330638307 hasConceptScore W2330638307C192562407 @default.
- W2330638307 hasConceptScore W2330638307C22423302 @default.
- W2330638307 hasConceptScore W2330638307C2776798109 @default.
- W2330638307 hasConceptScore W2330638307C2816523 @default.
- W2330638307 hasConceptScore W2330638307C49040817 @default.
- W2330638307 hasConceptScore W2330638307C513153333 @default.
- W2330638307 hasConceptScore W2330638307C51576277 @default.
- W2330638307 hasConceptScore W2330638307C61427134 @default.
- W2330638307 hasConceptScore W2330638307C64297162 @default.
- W2330638307 hasConceptScore W2330638307C71597924 @default.
- W2330638307 hasConceptScore W2330638307C86803240 @default.
- W2330638307 hasConceptScore W2330638307C97892325 @default.
- W2330638307 hasFunder F4320322795 @default.
- W2330638307 hasIssue "5" @default.
- W2330638307 hasLocation W23306383071 @default.
- W2330638307 hasOpenAccess W2330638307 @default.
- W2330638307 hasPrimaryLocation W23306383071 @default.
- W2330638307 hasRelatedWork W1595484566 @default.
- W2330638307 hasRelatedWork W1968373997 @default.
- W2330638307 hasRelatedWork W2030970608 @default.
- W2330638307 hasRelatedWork W2040549999 @default.
- W2330638307 hasRelatedWork W2094491269 @default.
- W2330638307 hasRelatedWork W2255166385 @default.
- W2330638307 hasRelatedWork W2316948141 @default.
- W2330638307 hasRelatedWork W2384143870 @default.
- W2330638307 hasRelatedWork W2982306760 @default.
- W2330638307 hasRelatedWork W4321265113 @default.
- W2330638307 hasVolume "6" @default.
- W2330638307 isParatext "false" @default.
- W2330638307 isRetracted "false" @default.
- W2330638307 magId "2330638307" @default.
- W2330638307 workType "article" @default.