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- W2330723178 abstract "Recently, the micro fluid systems have been extensively studied, where microactuators such as micro valves fabricated by MEMS technology are essential for realizing these systems. In this paper thermal microactuators with U-type and I-type shapes fabricated by SOI-MUMPs technology have been investigated for optimizing their configurations." @default.
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- W2330723178 date "2012-01-01" @default.
- W2330723178 modified "2023-09-23" @default.
- W2330723178 title "Cantilever-type Thermal Microactuators Fabricated by SOI-MUMPs with U-type and I-type Configurations" @default.
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- W2330723178 doi "https://doi.org/10.1541/ieejsmas.132.103" @default.
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