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• W2330751379 abstract "A resonant pressure sensor with piezoelectric excitation and sensing is presented, which is realised by combining a micromachined diaphragm and a quartz resonator. The sensor performance is improved by introducing double enhancement beams into the diaphragm. Finite element method is utilised to reveal the validity and optimise the structural dimensions. A self-excitation circuit is designed to drive the resonator into steady oscillation. The sensor chip is fabricated by bulk micromachining technologies and packaged in a metal shell in the inert gas environment for characterisation. The performance characteristics including the short-term drift, temperature characteristic and quality factor are investigated. The experimental results demonstrate that the sensor features a high sensitivity of 100.45 Hz/kPa and a short-term drift <14 ppm in the operating range of −10∼10 kPa at room temperature. Owing to the excellent performance in sensitivity and accuracy, the sensor can be applied for micropressure measurement." @default.
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• W2330751379 date "2016-06-01" @default.
• W2330751379 modified "2023-09-23" @default.
• W2330751379 title "Modelling and characterisation of a micromachined resonant pressure sensor with piezoelectric excitation and sensing" @default.
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• W2330751379 doi "https://doi.org/10.1049/mnl.2016.0016" @default.
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