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- W2331625912 endingPage "3215" @default.
- W2331625912 startingPage "3211" @default.
- W2331625912 abstract "We calculated the concentration profiles of important chemical species for TiO2 thin film growth on the glass beads in the TTIP + O2 plasmas and compared the predicted growth rates of thin films with the experimental measurements. The film thickness profile depends on the concentration profile of TiO(OC3H7)3 precursors in the gas phase because TiO(OC3H7)3 is the main precursor of the thin film. The TTIP concentration decreases with time, while the TiO(OC3H7)3 concentration increases, and they reach the steady state about 2 approximately 3 sec. The growth rate of TiO2 film predicted in this study was 9.2 nm/min and is in good agreements with the experimental result of 10.5 nm/min under the same process conditions. This study suggests that a uniform TiO2 thin film on particles can be obtained by using a rotating cylindrical PCVD reactor." @default.
- W2331625912 created "2016-06-24" @default.
- W2331625912 creator A5043854857 @default.
- W2331625912 creator A5080191581 @default.
- W2331625912 date "2010-05-01" @default.
- W2331625912 modified "2023-10-18" @default.
- W2331625912 title "Prediction of TiO<SUB>2</SUB> Thin Film Growth on the Glass Beads in a Rotating Plasma Chemical Vapor Deposition Reactor" @default.
- W2331625912 doi "https://doi.org/10.1166/jnn.2010.2320" @default.
- W2331625912 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/20358924" @default.
- W2331625912 hasPublicationYear "2010" @default.
- W2331625912 type Work @default.
- W2331625912 sameAs 2331625912 @default.
- W2331625912 citedByCount "1" @default.
- W2331625912 countsByYear W23316259122014 @default.
- W2331625912 crossrefType "journal-article" @default.
- W2331625912 hasAuthorship W2331625912A5043854857 @default.
- W2331625912 hasAuthorship W2331625912A5080191581 @default.
- W2331625912 hasConcept C113196181 @default.
- W2331625912 hasConcept C121332964 @default.
- W2331625912 hasConcept C127413603 @default.
- W2331625912 hasConcept C151730666 @default.
- W2331625912 hasConcept C159985019 @default.
- W2331625912 hasConcept C171250308 @default.
- W2331625912 hasConcept C178790620 @default.
- W2331625912 hasConcept C185592680 @default.
- W2331625912 hasConcept C19067145 @default.
- W2331625912 hasConcept C192562407 @default.
- W2331625912 hasConcept C2524010 @default.
- W2331625912 hasConcept C2778312390 @default.
- W2331625912 hasConcept C2816523 @default.
- W2331625912 hasConcept C33923547 @default.
- W2331625912 hasConcept C42360764 @default.
- W2331625912 hasConcept C43617362 @default.
- W2331625912 hasConcept C44280652 @default.
- W2331625912 hasConcept C57410435 @default.
- W2331625912 hasConcept C62520636 @default.
- W2331625912 hasConcept C64297162 @default.
- W2331625912 hasConcept C82706917 @default.
- W2331625912 hasConcept C86803240 @default.
- W2331625912 hasConceptScore W2331625912C113196181 @default.
- W2331625912 hasConceptScore W2331625912C121332964 @default.
- W2331625912 hasConceptScore W2331625912C127413603 @default.
- W2331625912 hasConceptScore W2331625912C151730666 @default.
- W2331625912 hasConceptScore W2331625912C159985019 @default.
- W2331625912 hasConceptScore W2331625912C171250308 @default.
- W2331625912 hasConceptScore W2331625912C178790620 @default.
- W2331625912 hasConceptScore W2331625912C185592680 @default.
- W2331625912 hasConceptScore W2331625912C19067145 @default.
- W2331625912 hasConceptScore W2331625912C192562407 @default.
- W2331625912 hasConceptScore W2331625912C2524010 @default.
- W2331625912 hasConceptScore W2331625912C2778312390 @default.
- W2331625912 hasConceptScore W2331625912C2816523 @default.
- W2331625912 hasConceptScore W2331625912C33923547 @default.
- W2331625912 hasConceptScore W2331625912C42360764 @default.
- W2331625912 hasConceptScore W2331625912C43617362 @default.
- W2331625912 hasConceptScore W2331625912C44280652 @default.
- W2331625912 hasConceptScore W2331625912C57410435 @default.
- W2331625912 hasConceptScore W2331625912C62520636 @default.
- W2331625912 hasConceptScore W2331625912C64297162 @default.
- W2331625912 hasConceptScore W2331625912C82706917 @default.
- W2331625912 hasConceptScore W2331625912C86803240 @default.
- W2331625912 hasIssue "5" @default.
- W2331625912 hasLocation W23316259121 @default.
- W2331625912 hasLocation W23316259122 @default.
- W2331625912 hasOpenAccess W2331625912 @default.
- W2331625912 hasPrimaryLocation W23316259121 @default.
- W2331625912 hasRelatedWork W2014315543 @default.
- W2331625912 hasRelatedWork W2051270029 @default.
- W2331625912 hasRelatedWork W2082293200 @default.
- W2331625912 hasRelatedWork W2137307547 @default.
- W2331625912 hasRelatedWork W2380293314 @default.
- W2331625912 hasRelatedWork W2943188944 @default.
- W2331625912 hasRelatedWork W3008690834 @default.
- W2331625912 hasRelatedWork W3082440218 @default.
- W2331625912 hasRelatedWork W4242480814 @default.
- W2331625912 hasRelatedWork W4285802202 @default.
- W2331625912 hasVolume "10" @default.
- W2331625912 isParatext "false" @default.
- W2331625912 isRetracted "false" @default.
- W2331625912 magId "2331625912" @default.
- W2331625912 workType "article" @default.