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• W2332437669 abstract "Flexible inorganic electronic devices promise numerous applications, especially in fields that could not be covered satisfactorily by conventional rigid devices. Benefits on a similar scale are also foreseeable for silicon photonic components. However, the difficulty in transferring intricate silicon photonic devices has deterred widespread development. In this paper, we demonstrate a flexible single-crystal silicon nanomembrane photonic crystal microcavity through a bonding and substrate removal approach. The transferred cavity shows a quality factor of 2.2 × 104 and could be bent to a curvature of 5 mm radius without deteriorating the performance compared to its counterparts on rigid substrates. A thorough characterization of the device reveals that the resonant wavelength is a linear function of the bending-induced strain. The device also shows a curvature-independent sensitivity to the ambient index variation." @default.
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• W2332437669 date "2014-11-24" @default.
• W2332437669 modified "2023-10-14" @default.
• W2332437669 title "Flexible Single-Crystal Silicon Nanomembrane Photonic Crystal Cavity" @default.
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• W2332437669 doi "https://doi.org/10.1021/nn504393j" @default.
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