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- W2332740214 abstract "EUV lithography condenser design requires a precise and efficient method for determining uniformity of irradiance on the mask plane. A new methodology is described and results for the method are compared to calculated values." @default.
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- W2332740214 date "2002-01-01" @default.
- W2332740214 modified "2023-09-25" @default.
- W2332740214 title "Source modeling and calculation of mask irradiance during EUV lithography condenser design" @default.
- W2332740214 doi "https://doi.org/10.1364/iodc.2002.ituc3" @default.
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