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- W2333427330 abstract "OVERVIEW: In order to support the volume production of advanced semiconductor devices in the 90-nm node, in addition to rapid startup, confirmation, and repairs of equipment at the device manufacturer’s site, e-diagnostics is required to provide a broad range of support services, including preventative maintenance and process support. Specific results that can be expected are: (1) reduction in MTTR (mean time to repair), (2) increased operation rate, and (3) reduction in maintenance management costs. Shigeyasu Sako Hideyuki Yamamoto Hideaki Kondo Juntaro Arima" @default.
- W2333427330 created "2016-06-24" @default.
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- W2333427330 date "2003-01-01" @default.
- W2333427330 modified "2023-09-27" @default.
- W2333427330 title "e-diagnostics Technology for Supporting e-manufacturing" @default.
- W2333427330 hasPublicationYear "2003" @default.
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