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W2333934206 abstract "In this paper, we describe a suppression technique of transverse-mode spurious responses for a surface acoustic wave (SAW) resonator with a near zero temperature coefficient of frequency (TCF) on a SiO 2 /Al/LiNbO 3 structure. We investigated the thinning of SiO 2 on the dummy electrode region and studied how the transverse-mode responses change with remaining SiO 2 thickness h on the dummy electrode region. As the results, we clarified that the remaining SiO 2 thickness h on the dummy electrode region has an optimum value and could suppress the transverse-mode spurious responses completely when H and h are set at 0.35 λ and 0.20 λ, respectively. It was demonstrated that the selective SiO 2 removal technique is effective to suppress transverse-mode spurious responses for SAW resonators employing the SiO 2 /Al/LiNbO 3 structure for a wide range of SiO 2 thicknesses, provided that the SiO 2 thickness at the dummy electrode region is adjusted properly." @default.
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W2333934206 date "2012-07-01" @default.
W2333934206 modified "2023-10-17" @default.
W2333934206 title "Transverse-Mode Spurious Suppression Technique for Surface Acoustic Wave Resonator with Zero Temperature Coefficient of Frequency on a SiO<sub>2</sub>/Al/LiNbO<sub>3</sub> Structure" @default.
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W2333934206 doi "https://doi.org/10.1143/jjap.51.07gc15" @default.
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