Matches in SemOpenAlex for { <https://semopenalex.org/work/W2334174552> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2334174552 endingPage "10135" @default.
- W2334174552 startingPage "10130" @default.
- W2334174552 abstract "We report the disordered silicon (Si) subwavelength structures (SWSs), which are fabricated with the use of inductively coupled plasma (ICP) etching in SiCl4 gas using nickel/silicon dioxide (Ni/SiO2) nanopattens as the etch mask, on Si substrates by varying the etching parameters for broadband antireflective and self-cleaning surfaces. For the fabricated Si SWSs, the antireflection characteristics are experimentally investigated and a theoretical analysis is made based on the rigorous coupled-wave analysis method. The desirable dot-like Ni nanoparticles on SiO2/Si substrates are formed by the thermal dewetting process of Ni films at 900 degrees C. The truncated cone shaped Si SWS with a high average height of 790 +/- 23 nm, which is fabricated by ICP etching with 5 sccm SiCl4 at 50 W RF power with additional 200 W ICP power under 10 mTorr process pressure, exhibits a low average reflectance of approximately 5% over a wide wavelength range of 450-1050 nm. The water contact angle of 110 degrees is obtained, indicating a hydrophobic surface. The calculated reflectance results are also reasonably consistent with the experimental data." @default.
- W2334174552 created "2016-06-24" @default.
- W2334174552 creator A5016546638 @default.
- W2334174552 creator A5018960247 @default.
- W2334174552 creator A5032262113 @default.
- W2334174552 date "2011-11-01" @default.
- W2334174552 modified "2023-09-23" @default.
- W2334174552 title "Antireflective Hydrophobic Si Subwavelength Structures Using Thermally Dewetted Ni/SiO2 Nanomask Patterns" @default.
- W2334174552 doi "https://doi.org/10.1166/jnn.2011.5000" @default.
- W2334174552 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/22413355" @default.
- W2334174552 hasPublicationYear "2011" @default.
- W2334174552 type Work @default.
- W2334174552 sameAs 2334174552 @default.
- W2334174552 citedByCount "2" @default.
- W2334174552 countsByYear W23341745522014 @default.
- W2334174552 countsByYear W23341745522019 @default.
- W2334174552 crossrefType "journal-article" @default.
- W2334174552 hasAuthorship W2334174552A5016546638 @default.
- W2334174552 hasAuthorship W2334174552A5018960247 @default.
- W2334174552 hasAuthorship W2334174552A5032262113 @default.
- W2334174552 hasConcept C100460472 @default.
- W2334174552 hasConcept C108406538 @default.
- W2334174552 hasConcept C113196181 @default.
- W2334174552 hasConcept C120665830 @default.
- W2334174552 hasConcept C121332964 @default.
- W2334174552 hasConcept C159985019 @default.
- W2334174552 hasConcept C171250308 @default.
- W2334174552 hasConcept C185592680 @default.
- W2334174552 hasConcept C19067145 @default.
- W2334174552 hasConcept C192562407 @default.
- W2334174552 hasConcept C2779227376 @default.
- W2334174552 hasConcept C30646810 @default.
- W2334174552 hasConcept C43617362 @default.
- W2334174552 hasConcept C49040817 @default.
- W2334174552 hasConcept C544956773 @default.
- W2334174552 hasConcept C62520636 @default.
- W2334174552 hasConcept C6556556 @default.
- W2334174552 hasConcept C82706917 @default.
- W2334174552 hasConcept C87525152 @default.
- W2334174552 hasConcept C95974651 @default.
- W2334174552 hasConcept C97355855 @default.
- W2334174552 hasConceptScore W2334174552C100460472 @default.
- W2334174552 hasConceptScore W2334174552C108406538 @default.
- W2334174552 hasConceptScore W2334174552C113196181 @default.
- W2334174552 hasConceptScore W2334174552C120665830 @default.
- W2334174552 hasConceptScore W2334174552C121332964 @default.
- W2334174552 hasConceptScore W2334174552C159985019 @default.
- W2334174552 hasConceptScore W2334174552C171250308 @default.
- W2334174552 hasConceptScore W2334174552C185592680 @default.
- W2334174552 hasConceptScore W2334174552C19067145 @default.
- W2334174552 hasConceptScore W2334174552C192562407 @default.
- W2334174552 hasConceptScore W2334174552C2779227376 @default.
- W2334174552 hasConceptScore W2334174552C30646810 @default.
- W2334174552 hasConceptScore W2334174552C43617362 @default.
- W2334174552 hasConceptScore W2334174552C49040817 @default.
- W2334174552 hasConceptScore W2334174552C544956773 @default.
- W2334174552 hasConceptScore W2334174552C62520636 @default.
- W2334174552 hasConceptScore W2334174552C6556556 @default.
- W2334174552 hasConceptScore W2334174552C82706917 @default.
- W2334174552 hasConceptScore W2334174552C87525152 @default.
- W2334174552 hasConceptScore W2334174552C95974651 @default.
- W2334174552 hasConceptScore W2334174552C97355855 @default.
- W2334174552 hasIssue "11" @default.
- W2334174552 hasLocation W23341745521 @default.
- W2334174552 hasLocation W23341745522 @default.
- W2334174552 hasOpenAccess W2334174552 @default.
- W2334174552 hasPrimaryLocation W23341745521 @default.
- W2334174552 hasRelatedWork W2017222986 @default.
- W2334174552 hasRelatedWork W2024422983 @default.
- W2334174552 hasRelatedWork W2024445122 @default.
- W2334174552 hasRelatedWork W2045764503 @default.
- W2334174552 hasRelatedWork W2049296028 @default.
- W2334174552 hasRelatedWork W2067029194 @default.
- W2334174552 hasRelatedWork W2068629328 @default.
- W2334174552 hasRelatedWork W2084118129 @default.
- W2334174552 hasRelatedWork W2334174552 @default.
- W2334174552 hasRelatedWork W807950441 @default.
- W2334174552 hasVolume "11" @default.
- W2334174552 isParatext "false" @default.
- W2334174552 isRetracted "false" @default.
- W2334174552 magId "2334174552" @default.
- W2334174552 workType "article" @default.