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- W2334451145 abstract "This paper presents an analytical investigation into the optimization of a diaphragm that will be used for optical high-frequency MEMS pressure sensors. In this optimization different properties and characteristics were investigated: material choices, thickness, diameter, and natural frequencies. This diaphragm is being optimized to perform accurately, consistently, and sensitively in harsh environments, such as in turbojet combustion chambers. Currently, a systems model is being developed to predict dynamic responses of the pressure sensor diaphragm and preliminary results will be presented here. An optimization process, optimization references, and an actual optimization are also presented in this paper." @default.
- W2334451145 created "2016-06-24" @default.
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- W2334451145 date "2002-07-07" @default.
- W2334451145 modified "2023-09-25" @default.
- W2334451145 title "Diaphragm Optimization for a Fiber Optic, High Frequency, High Temperature Micro-Pressure Sensor" @default.
- W2334451145 doi "https://doi.org/10.2514/6.2002-3737" @default.
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