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- W2334603615 abstract "Die B- und P-Diffusion in Si-Substrate wird in verschiedenen Atmosphären (trockenes N2, HCl-trocknes O2-Mischungen, feuchtes O2) zwischen 1000 und 1 150°C experimentell untersucht." @default.
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- W2334603615 date "1976-12-21" @default.
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- W2334603615 title "ChemInform Abstract: RESTRAINED DIFFUSION OF BORON AND PHOSPHORUS IN SILICON IN AN OXYGEN ATMOSPHERE CONTAINING HYDROGEN CHLORIDE" @default.
- W2334603615 cites W1996562186 @default.
- W2334603615 doi "https://doi.org/10.1002/chin.197651002" @default.
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