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• W2334634567 abstract "A review of the integration of the complementry metal oxide semiconductors (CMOS) circuit with the microelectromechanical systems (MEMS) structures for sensing and RF applications has been presented. Specifically, the integrated mechanical sensors, chemical gas sensors, and biochemical sensors have been discussed. Application of MEMS as switches, varactors, and inductors and their integration in RF circuits has also been highlighted. The fabrication and design challenges for the CMOS-MEMS integration have been described. A new design methodology for integration of thermal effects in an integrated pressure sensor has been proposed." @default.
• W2334634567 created "2016-06-24" @default.
• W2334634567 creator A5044535131 @default.
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• W2334634567 date "2009-01-01" @default.
• W2334634567 modified "2023-09-27" @default.
• W2334634567 title "Complementary Metal Oxide SemiconductorsñMicroelectromechanical Systems Integration" @default.
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• W2334634567 hasPublicationYear "2009" @default.
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