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- W2334650960 abstract "The viscous losses in vibrating micromachined cantilevers, similar to those used for ambient sensing and biological detection, are computed using several methods: existing semi-analytical models, quasi-steady solutions of the Navier-Stokes equations with and without slip boundary conditions, and unsteady solutions of the Navier-Stokes equations with and without slip boundary conditions. The results are compared to experimental data for two geometries: a 40 μm wide, 5 μm thick, and 200 μm long cantilever vibrating at 1.04 x 10 s, and a 100 μm wide, 5 μm thick, and 600 μm long cantilever vibrating at 1.15 x 10 s. The quasi-steady solutions fail to capture observed characteristics of this damping, including strong pressure dependence. Semi-analytic solutions give pressure dependence weaker than that encountered experimentally. At pressures between 10 KPa and 70 KPa, the unsteady solution of the Navier-Stokes equations computes damping consistent with that observed experimentally. Use of a slip boundary condition changes the computed viscous loss by several percent, and appears to of much less importance than unsteady effects. The quality factor is then computed as a function of frequency for a 10 μm wide, 5 μm thick cantilever vibrating at atmospheric pressure at frequencies between 4.14 x 10 and 8.46 x 10 s. The results agree with experimental data over a range of frequencies, suggesting that unsteady computational fluid mechanics provides a reliable method for prediction of the performance of micro-resonators." @default.
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- W2334650960 date "2008-01-07" @default.
- W2334650960 modified "2023-10-16" @default.
- W2334650960 title "Computation of Damping for Vibrating Micro-Machined Cantilevers in the Slip Flow Regime" @default.
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- W2334650960 doi "https://doi.org/10.2514/6.2008-690" @default.
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