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- W2335168416 endingPage "1017" @default.
- W2335168416 startingPage "1007" @default.
- W2335168416 abstract "To address the abating performance improvements from device scaling, innovative 2.5-D and 3-D integrated circuits with vertical interconnects called through-silicon vias (TSVs) have been widely explored. This paper reviews TSVs with focus on the following: 1) key drivers for TSV-based integration; 2) TSV fabrication techniques; 3) TSV electrical and thermomechanical performance fundamentals and characterization techniques; and 4) novel technologies to attain enhanced performance beyond the state-of-the-art TSVs." @default.
- W2335168416 created "2016-06-24" @default.
- W2335168416 creator A5026513000 @default.
- W2335168416 creator A5044507102 @default.
- W2335168416 creator A5070687795 @default.
- W2335168416 creator A5080867898 @default.
- W2335168416 date "2016-07-01" @default.
- W2335168416 modified "2023-10-05" @default.
- W2335168416 title "Through-Silicon Vias: Drivers, Performance, and Innovations" @default.
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