Matches in SemOpenAlex for { <https://semopenalex.org/work/W2335231682> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2335231682 endingPage "188" @default.
- W2335231682 startingPage "183" @default.
- W2335231682 abstract "Ion implantation is employed for trench sidewall doping. Aspect ratios of trenches for high Mbit DRAM become very large, so that very small grazing incidence ion implantation to sidewall is necessary to avoid shadowing effect. In this case, ion reflection in trenches occurs at a high rate and these reflected ions are implanted to the opposite sidewall, so it is very important to know this effect to apply real devices. We have studied these ion reflection effects in trenches by SIMS, and spatial and energy distributions by Monte Carlo Simulation. It is found that reflected atoms were concentrated at the specular reflection angle. The reflected ions were also scattered with large angles because of diffuse and inelastic scattering. These diffusely scattered atoms are implanted to the region facing to the directly implanted region. The experimental results are reproduced well by using distribution functions for an amorphous surface." @default.
- W2335231682 created "2016-06-24" @default.
- W2335231682 creator A5017207800 @default.
- W2335231682 creator A5032003867 @default.
- W2335231682 creator A5062214131 @default.
- W2335231682 creator A5085595411 @default.
- W2335231682 date "1990-01-01" @default.
- W2335231682 modified "2023-09-28" @default.
- W2335231682 title "Measurement and simulation of impurity distribution in the opposite trench sidewall implanted by reflection." @default.
- W2335231682 doi "https://doi.org/10.1380/jsssj.11.183" @default.
- W2335231682 hasPublicationYear "1990" @default.
- W2335231682 type Work @default.
- W2335231682 sameAs 2335231682 @default.
- W2335231682 citedByCount "0" @default.
- W2335231682 crossrefType "journal-article" @default.
- W2335231682 hasAuthorship W2335231682A5017207800 @default.
- W2335231682 hasAuthorship W2335231682A5032003867 @default.
- W2335231682 hasAuthorship W2335231682A5062214131 @default.
- W2335231682 hasAuthorship W2335231682A5085595411 @default.
- W2335231682 hasBestOaLocation W23352316821 @default.
- W2335231682 hasConcept C105795698 @default.
- W2335231682 hasConcept C118381688 @default.
- W2335231682 hasConcept C120665830 @default.
- W2335231682 hasConcept C121332964 @default.
- W2335231682 hasConcept C145148216 @default.
- W2335231682 hasConcept C155310634 @default.
- W2335231682 hasConcept C171250308 @default.
- W2335231682 hasConcept C184779094 @default.
- W2335231682 hasConcept C191486275 @default.
- W2335231682 hasConcept C192562407 @default.
- W2335231682 hasConcept C19499675 @default.
- W2335231682 hasConcept C199360897 @default.
- W2335231682 hasConcept C2779227376 @default.
- W2335231682 hasConcept C33923547 @default.
- W2335231682 hasConcept C41008148 @default.
- W2335231682 hasConcept C41823505 @default.
- W2335231682 hasConcept C41999313 @default.
- W2335231682 hasConcept C49040817 @default.
- W2335231682 hasConcept C57863236 @default.
- W2335231682 hasConcept C62520636 @default.
- W2335231682 hasConcept C65682993 @default.
- W2335231682 hasConcept C71987851 @default.
- W2335231682 hasConceptScore W2335231682C105795698 @default.
- W2335231682 hasConceptScore W2335231682C118381688 @default.
- W2335231682 hasConceptScore W2335231682C120665830 @default.
- W2335231682 hasConceptScore W2335231682C121332964 @default.
- W2335231682 hasConceptScore W2335231682C145148216 @default.
- W2335231682 hasConceptScore W2335231682C155310634 @default.
- W2335231682 hasConceptScore W2335231682C171250308 @default.
- W2335231682 hasConceptScore W2335231682C184779094 @default.
- W2335231682 hasConceptScore W2335231682C191486275 @default.
- W2335231682 hasConceptScore W2335231682C192562407 @default.
- W2335231682 hasConceptScore W2335231682C19499675 @default.
- W2335231682 hasConceptScore W2335231682C199360897 @default.
- W2335231682 hasConceptScore W2335231682C2779227376 @default.
- W2335231682 hasConceptScore W2335231682C33923547 @default.
- W2335231682 hasConceptScore W2335231682C41008148 @default.
- W2335231682 hasConceptScore W2335231682C41823505 @default.
- W2335231682 hasConceptScore W2335231682C41999313 @default.
- W2335231682 hasConceptScore W2335231682C49040817 @default.
- W2335231682 hasConceptScore W2335231682C57863236 @default.
- W2335231682 hasConceptScore W2335231682C62520636 @default.
- W2335231682 hasConceptScore W2335231682C65682993 @default.
- W2335231682 hasConceptScore W2335231682C71987851 @default.
- W2335231682 hasIssue "3" @default.
- W2335231682 hasLocation W23352316821 @default.
- W2335231682 hasOpenAccess W2335231682 @default.
- W2335231682 hasPrimaryLocation W23352316821 @default.
- W2335231682 hasRelatedWork W1965882733 @default.
- W2335231682 hasRelatedWork W1970164814 @default.
- W2335231682 hasRelatedWork W1976638643 @default.
- W2335231682 hasRelatedWork W1984472219 @default.
- W2335231682 hasRelatedWork W1984702547 @default.
- W2335231682 hasRelatedWork W1987447582 @default.
- W2335231682 hasRelatedWork W1994143636 @default.
- W2335231682 hasRelatedWork W2002257253 @default.
- W2335231682 hasRelatedWork W2007124497 @default.
- W2335231682 hasRelatedWork W2017175349 @default.
- W2335231682 hasRelatedWork W2019134065 @default.
- W2335231682 hasRelatedWork W2033965750 @default.
- W2335231682 hasRelatedWork W2037351306 @default.
- W2335231682 hasRelatedWork W2048780816 @default.
- W2335231682 hasRelatedWork W2073073726 @default.
- W2335231682 hasRelatedWork W2087275561 @default.
- W2335231682 hasRelatedWork W2093997135 @default.
- W2335231682 hasRelatedWork W2105737714 @default.
- W2335231682 hasRelatedWork W2969975990 @default.
- W2335231682 hasRelatedWork W3004482499 @default.
- W2335231682 hasVolume "11" @default.
- W2335231682 isParatext "false" @default.
- W2335231682 isRetracted "false" @default.
- W2335231682 magId "2335231682" @default.
- W2335231682 workType "article" @default.