Matches in SemOpenAlex for { <https://semopenalex.org/work/W2336140170> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2336140170 abstract "The dependence of the microstructure of Ge2Sb2Te5 (GST) on Ti diffusion into GST by annealing in GST/Ti/TiN phase-change random access memory stack was studied by various transmission electron microscopy (TEM) techniques. The microstructure and crystal structure of GST were identified with high-resolution TEM (HRTEM) and image simulation technique, and the Ti diffusion into GST was revealed by scanning transmission electron microscope-energy-dispersive X-ray spectroscopy analysis. It was observed that Ti atoms of Ti/TiN thin layers were incorporated into GST cell through several thermal annealing steps and they could retard the phase transition from face-centered cubic (FCC) phase into hexagonal close-packed (HCP) phase partially and restrain the increase in grain size. Thus, it is concluded that Ti diffusion can affect the microstructure of GST including the type of the crystal phase and grain size of GST. It was shown that the insertion of diffusion barrier between TiN and GST could block Ti diffusion into GST and make it possible for FCC phase to completely transform into HCP phase." @default.
- W2336140170 created "2016-06-24" @default.
- W2336140170 creator A5000572251 @default.
- W2336140170 creator A5045914271 @default.
- W2336140170 date "2015-07-16" @default.
- W2336140170 modified "2023-09-27" @default.
- W2336140170 title "Effect of Ti diffusion on the microstructure of Ge2Sb2Te5in phase-change memory cell" @default.
- W2336140170 cites W1483176180 @default.
- W2336140170 cites W1601254409 @default.
- W2336140170 cites W1655624757 @default.
- W2336140170 cites W1657293631 @default.
- W2336140170 cites W1661709965 @default.
- W2336140170 cites W1679750219 @default.
- W2336140170 cites W1799592261 @default.
- W2336140170 cites W1966441412 @default.
- W2336140170 cites W1982394466 @default.
- W2336140170 cites W2007859020 @default.
- W2336140170 cites W2041744702 @default.
- W2336140170 cites W2072768567 @default.
- W2336140170 cites W2096647267 @default.
- W2336140170 cites W2116717180 @default.
- W2336140170 doi "https://doi.org/10.1093/jmicro/dfv039" @default.
- W2336140170 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/26185146" @default.
- W2336140170 hasPublicationYear "2015" @default.
- W2336140170 type Work @default.
- W2336140170 sameAs 2336140170 @default.
- W2336140170 citedByCount "1" @default.
- W2336140170 countsByYear W23361401702020 @default.
- W2336140170 crossrefType "journal-article" @default.
- W2336140170 hasAuthorship W2336140170A5000572251 @default.
- W2336140170 hasAuthorship W2336140170A5045914271 @default.
- W2336140170 hasConcept C113196181 @default.
- W2336140170 hasConcept C146088050 @default.
- W2336140170 hasConcept C161368742 @default.
- W2336140170 hasConcept C171250308 @default.
- W2336140170 hasConcept C185592680 @default.
- W2336140170 hasConcept C191897082 @default.
- W2336140170 hasConcept C192191005 @default.
- W2336140170 hasConcept C192562407 @default.
- W2336140170 hasConcept C24444364 @default.
- W2336140170 hasConcept C2777855556 @default.
- W2336140170 hasConcept C43617362 @default.
- W2336140170 hasConcept C47908070 @default.
- W2336140170 hasConcept C525849907 @default.
- W2336140170 hasConcept C8010536 @default.
- W2336140170 hasConcept C87976508 @default.
- W2336140170 hasConceptScore W2336140170C113196181 @default.
- W2336140170 hasConceptScore W2336140170C146088050 @default.
- W2336140170 hasConceptScore W2336140170C161368742 @default.
- W2336140170 hasConceptScore W2336140170C171250308 @default.
- W2336140170 hasConceptScore W2336140170C185592680 @default.
- W2336140170 hasConceptScore W2336140170C191897082 @default.
- W2336140170 hasConceptScore W2336140170C192191005 @default.
- W2336140170 hasConceptScore W2336140170C192562407 @default.
- W2336140170 hasConceptScore W2336140170C24444364 @default.
- W2336140170 hasConceptScore W2336140170C2777855556 @default.
- W2336140170 hasConceptScore W2336140170C43617362 @default.
- W2336140170 hasConceptScore W2336140170C47908070 @default.
- W2336140170 hasConceptScore W2336140170C525849907 @default.
- W2336140170 hasConceptScore W2336140170C8010536 @default.
- W2336140170 hasConceptScore W2336140170C87976508 @default.
- W2336140170 hasLocation W23361401701 @default.
- W2336140170 hasLocation W23361401702 @default.
- W2336140170 hasOpenAccess W2336140170 @default.
- W2336140170 hasPrimaryLocation W23361401701 @default.
- W2336140170 hasRelatedWork W2000254956 @default.
- W2336140170 hasRelatedWork W2005554766 @default.
- W2336140170 hasRelatedWork W2005606260 @default.
- W2336140170 hasRelatedWork W2030992527 @default.
- W2336140170 hasRelatedWork W2035551168 @default.
- W2336140170 hasRelatedWork W2050609138 @default.
- W2336140170 hasRelatedWork W2060157051 @default.
- W2336140170 hasRelatedWork W2064677798 @default.
- W2336140170 hasRelatedWork W2095129838 @default.
- W2336140170 hasRelatedWork W212258880 @default.
- W2336140170 hasRelatedWork W2212741528 @default.
- W2336140170 hasRelatedWork W2313499218 @default.
- W2336140170 hasRelatedWork W2610654635 @default.
- W2336140170 hasRelatedWork W2611407187 @default.
- W2336140170 hasRelatedWork W2801536402 @default.
- W2336140170 hasRelatedWork W2888075511 @default.
- W2336140170 hasRelatedWork W2965769849 @default.
- W2336140170 hasRelatedWork W2990157644 @default.
- W2336140170 hasRelatedWork W3028068920 @default.
- W2336140170 hasRelatedWork W3194056473 @default.
- W2336140170 isParatext "false" @default.
- W2336140170 isRetracted "false" @default.
- W2336140170 magId "2336140170" @default.
- W2336140170 workType "article" @default.