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- W2336351311 abstract "Mit dem Ziel, ein einheitlicheres Bild von der Keimbildung des Si als Funktion der Zusammensetzung der Gasphase und der Temp. zu erlangen, werden Keimbildung und Wachstum von Si auf SiOg- und Si3N4-Substraten im System SiHr-HCI-H, bei Temp. zwischen 925 und 1200°C untersucht." @default.
- W2336351311 created "2016-06-24" @default.
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- W2336351311 date "1980-05-13" @default.
- W2336351311 modified "2023-09-24" @default.
- W2336351311 title "ChemInform Abstract: THE NUCLEATION OF CVD SILICON ON SILICON DIOXIDE AND SILICON NITRIDE SUBSTRATES. I. THE MONOSILANE-HYDROGEN CHLORIDE-MOLECULAR HYDROGEN SYSTEM AT HIGH TEMPERATURES" @default.
- W2336351311 cites W4255422431 @default.
- W2336351311 doi "https://doi.org/10.1002/chin.198019004" @default.
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