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- W2337686422 abstract "This work presents hydrogen (H2) sensing properties of platinum (Pt) thin film deposited on glass substrate by sputter technique. The Pt thin films with different thickness prepared using RF sputtering method were characterized by the XRD, SEM and XPS techniques. Temperature dependent resistances and the gas measurements of the Pt thin films were investigated under a dry air flow at a temperature range from 30 °C to 200 °C. The H2 sensing properties of Pt thin film sensors were also examined in the concentration range of 0.1–1% H2. The results revealed that the Pt thin film with 2 nm thickness exhibited the best sensing performance to H2 at 30 °C under dry air flow." @default.
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- W2337686422 date "2016-08-01" @default.
- W2337686422 modified "2023-10-17" @default.
- W2337686422 title "Sputtered platinum thin films for resistive hydrogen sensor application" @default.
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- W2337686422 doi "https://doi.org/10.1016/j.matlet.2016.04.134" @default.
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