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- W2338691722 abstract "Copper (Cu) and iron (Fe) impurities in the silicon bulk of highly borondoped silicon wafers were investigated using the Dynamic Secondary Ion Mass Spectrometry (D-SIMS). Competition between segregation at the highly boron-doped and polysilicon layer was observed. Enhanced gettering into polysilicon layer after subjecting to a combined effect of isothermal annealing and electric field (40 kV/cm) was attributed to the thermally induced dissociations of Cu and Fe complexes and field-enhanced directional drift of positive Cu and Fe interstitials (CuI) towards the polysilicon sink." @default.
- W2338691722 created "2016-06-24" @default.
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- W2338691722 date "2014-01-01" @default.
- W2338691722 modified "2023-09-27" @default.
- W2338691722 title "Electric-field enhanced diffusion and polysilicon gettering of copper and iron in silicon wafer" @default.
- W2338691722 hasPublicationYear "2014" @default.
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