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- W2338822045 abstract "Selective dissolution of hafnium-peroxo-sulfate films in aqueous tetramethylammonium hydroxide enables extreme UV lithographic patterning of sub-10 nm HfO2 structures. Hafnium speciation under these basic conditions (pH>10), however, is unknown, as studies of hafnium aqueous chemistry have been limited to acid. Here, we report synthesis, crystal growth, and structural characterization of the first polynuclear hydroxo hafnium cluster isolated from base, [TMA]6[Hf6(μ-O2)6(μ-OH)6(OH)12]⋅38 H2O. The solution behavior of the cluster, including supramolecular assembly via hydrogen bonding is detailed via small-angle X-ray scattering (SAXS) and electrospray ionization mass spectrometry (ESI-MS). The study opens a new chapter in the aqueous chemistry of hafnium, exemplifying the concept of amphoteric clusters and informing a critical process in single-digit-nm lithography." @default.
- W2338822045 created "2016-06-24" @default.
- W2338822045 creator A5056068628 @default.
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- W2338822045 date "2016-04-20" @default.
- W2338822045 modified "2023-10-10" @default.
- W2338822045 title "Amphoteric Aqueous Hafnium Cluster Chemistry" @default.
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- W2338822045 doi "https://doi.org/10.1002/anie.201601134" @default.
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