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- W2338872021 endingPage "012028" @default.
- W2338872021 startingPage "012028" @default.
- W2338872021 abstract "The cryogenic plasma chemical silicon etching process is developed, able to form the structured silicon layer with system of deep holes with high aspect ratio." @default.
- W2338872021 created "2016-06-24" @default.
- W2338872021 creator A5018605385 @default.
- W2338872021 creator A5047818276 @default.
- W2338872021 creator A5051290766 @default.
- W2338872021 creator A5072127149 @default.
- W2338872021 creator A5082096362 @default.
- W2338872021 creator A5090544700 @default.
- W2338872021 date "2016-04-01" @default.
- W2338872021 modified "2023-09-24" @default.
- W2338872021 title "Plasma chemical silicon etching process*" @default.
- W2338872021 cites W2036272015 @default.
- W2338872021 cites W2045381844 @default.
- W2338872021 doi "https://doi.org/10.1088/1757-899x/122/1/012028" @default.
- W2338872021 hasPublicationYear "2016" @default.
- W2338872021 type Work @default.
- W2338872021 sameAs 2338872021 @default.
- W2338872021 citedByCount "1" @default.
- W2338872021 countsByYear W23388720212021 @default.
- W2338872021 crossrefType "journal-article" @default.
- W2338872021 hasAuthorship W2338872021A5018605385 @default.
- W2338872021 hasAuthorship W2338872021A5047818276 @default.
- W2338872021 hasAuthorship W2338872021A5051290766 @default.
- W2338872021 hasAuthorship W2338872021A5072127149 @default.
- W2338872021 hasAuthorship W2338872021A5082096362 @default.
- W2338872021 hasAuthorship W2338872021A5090544700 @default.
- W2338872021 hasBestOaLocation W23388720211 @default.
- W2338872021 hasConcept C100460472 @default.
- W2338872021 hasConcept C107187091 @default.
- W2338872021 hasConcept C111919701 @default.
- W2338872021 hasConcept C121332964 @default.
- W2338872021 hasConcept C130472188 @default.
- W2338872021 hasConcept C171250308 @default.
- W2338872021 hasConcept C185544564 @default.
- W2338872021 hasConcept C192562407 @default.
- W2338872021 hasConcept C2779227376 @default.
- W2338872021 hasConcept C33220542 @default.
- W2338872021 hasConcept C41008148 @default.
- W2338872021 hasConcept C49040817 @default.
- W2338872021 hasConcept C544956773 @default.
- W2338872021 hasConcept C82706917 @default.
- W2338872021 hasConcept C98045186 @default.
- W2338872021 hasConceptScore W2338872021C100460472 @default.
- W2338872021 hasConceptScore W2338872021C107187091 @default.
- W2338872021 hasConceptScore W2338872021C111919701 @default.
- W2338872021 hasConceptScore W2338872021C121332964 @default.
- W2338872021 hasConceptScore W2338872021C130472188 @default.
- W2338872021 hasConceptScore W2338872021C171250308 @default.
- W2338872021 hasConceptScore W2338872021C185544564 @default.
- W2338872021 hasConceptScore W2338872021C192562407 @default.
- W2338872021 hasConceptScore W2338872021C2779227376 @default.
- W2338872021 hasConceptScore W2338872021C33220542 @default.
- W2338872021 hasConceptScore W2338872021C41008148 @default.
- W2338872021 hasConceptScore W2338872021C49040817 @default.
- W2338872021 hasConceptScore W2338872021C544956773 @default.
- W2338872021 hasConceptScore W2338872021C82706917 @default.
- W2338872021 hasConceptScore W2338872021C98045186 @default.
- W2338872021 hasLocation W23388720211 @default.
- W2338872021 hasOpenAccess W2338872021 @default.
- W2338872021 hasPrimaryLocation W23388720211 @default.
- W2338872021 hasRelatedWork W1510549765 @default.
- W2338872021 hasRelatedWork W1994603784 @default.
- W2338872021 hasRelatedWork W2036992564 @default.
- W2338872021 hasRelatedWork W2078001012 @default.
- W2338872021 hasRelatedWork W2168327130 @default.
- W2338872021 hasRelatedWork W2322197603 @default.
- W2338872021 hasRelatedWork W2385387985 @default.
- W2338872021 hasRelatedWork W2512706461 @default.
- W2338872021 hasRelatedWork W2546297835 @default.
- W2338872021 hasRelatedWork W2748603911 @default.
- W2338872021 hasVolume "122" @default.
- W2338872021 isParatext "false" @default.
- W2338872021 isRetracted "false" @default.
- W2338872021 magId "2338872021" @default.
- W2338872021 workType "article" @default.