FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2339460983> ?p ?o ?g. }

• W2339460983 endingPage "327" @default.
• W2339460983 startingPage "324" @default.
• W2339460983 abstract "We report on building a novel chemical vapor deposition (CVD) reactor for diamond delta-doping. The main features of our reactor are: a) the use of rapid gas switching system, (b) the reactor design providing the laminar gas flow. These features provide the creation of ultra-sharp interfaces between doped and undoped material and minimize the prolonged ”tails” formation in the doping profile. It is proved by optical emission spectroscopy that gas switching time is not more than 10 seconds. Using the novel reactor we have grown the nanometer-thin layers of boron doped diamond. The FWHM of boron concentration profile is about 2 nm which is proved by SIMS. It is shown that the both single delta-layer and multiple delta-layers could be grown using the novel CVD reactor. In principle, the reactor could be used for diamond delta doping with other dopants, like nitrogen, phosphorus etc. (© 2016 WILEY-VCH Verlag GmbH &Co. KGaA, Weinheim)" @default.
• W2339460983 created "2016-06-24" @default.
• W2339460983 creator A5001820777 @default.
• W2339460983 creator A5007527113 @default.
• W2339460983 creator A5017671617 @default.
• W2339460983 creator A5029232363 @default.
• W2339460983 creator A5036042895 @default.
• W2339460983 creator A5065926364 @default.
• W2339460983 creator A5070756316 @default.
• W2339460983 creator A5075588479 @default.
• W2339460983 creator A5076779535 @default.
• W2339460983 creator A5084856573 @default.
• W2339460983 date "2016-02-02" @default.
• W2339460983 modified "2023-09-25" @default.
• W2339460983 title "Novel microwave plasma-assisted CVD reactor for diamond delta doping" @default.
• W2339460983 cites W1551412532 @default.
• W2339460983 cites W1570042686 @default.
• W2339460983 cites W1902576107 @default.
• W2339460983 cites W1965725706 @default.
• W2339460983 cites W1967492796 @default.
• W2339460983 cites W1977689509 @default.
• W2339460983 cites W1983446881 @default.
• W2339460983 cites W2003013548 @default.
• W2339460983 cites W2008346388 @default.
• W2339460983 cites W2039448763 @default.
• W2339460983 cites W2057779722 @default.
• W2339460983 cites W2070998851 @default.
• W2339460983 cites W2092159003 @default.
• W2339460983 cites W2093713602 @default.
• W2339460983 cites W2094631614 @default.
• W2339460983 cites W2099319370 @default.
• W2339460983 cites W2148062445 @default.
• W2339460983 cites W2166874258 @default.
• W2339460983 cites W2172227058 @default.
• W2339460983 cites W2546843559 @default.
• W2339460983 cites W613162810 @default.
• W2339460983 doi "https://doi.org/10.1002/pssr.201510453" @default.
• W2339460983 hasPublicationYear "2016" @default.
• W2339460983 type Work @default.
• W2339460983 sameAs 2339460983 @default.
• W2339460983 citedByCount "43" @default.
• W2339460983 countsByYear W23394609832016 @default.
• W2339460983 countsByYear W23394609832017 @default.
• W2339460983 countsByYear W23394609832018 @default.
• W2339460983 countsByYear W23394609832019 @default.
• W2339460983 countsByYear W23394609832020 @default.
• W2339460983 countsByYear W23394609832021 @default.
• W2339460983 countsByYear W23394609832022 @default.
• W2339460983 countsByYear W23394609832023 @default.
• W2339460983 crossrefType "journal-article" @default.
• W2339460983 hasAuthorship W2339460983A5001820777 @default.
• W2339460983 hasAuthorship W2339460983A5007527113 @default.
• W2339460983 hasAuthorship W2339460983A5017671617 @default.
• W2339460983 hasAuthorship W2339460983A5029232363 @default.
• W2339460983 hasAuthorship W2339460983A5036042895 @default.
• W2339460983 hasAuthorship W2339460983A5065926364 @default.
• W2339460983 hasAuthorship W2339460983A5070756316 @default.
• W2339460983 hasAuthorship W2339460983A5075588479 @default.
• W2339460983 hasAuthorship W2339460983A5076779535 @default.
• W2339460983 hasAuthorship W2339460983A5084856573 @default.
• W2339460983 hasConcept C108649604 @default.
• W2339460983 hasConcept C113196181 @default.
• W2339460983 hasConcept C159985019 @default.
• W2339460983 hasConcept C178790620 @default.
• W2339460983 hasConcept C185592680 @default.
• W2339460983 hasConcept C191952053 @default.
• W2339460983 hasConcept C192562407 @default.
• W2339460983 hasConcept C2776921476 @default.
• W2339460983 hasConcept C43617362 @default.
• W2339460983 hasConcept C49040817 @default.
• W2339460983 hasConcept C501308230 @default.
• W2339460983 hasConcept C57410435 @default.
• W2339460983 hasConcept C57863236 @default.
• W2339460983 hasConceptScore W2339460983C108649604 @default.
• W2339460983 hasConceptScore W2339460983C113196181 @default.
• W2339460983 hasConceptScore W2339460983C159985019 @default.
• W2339460983 hasConceptScore W2339460983C178790620 @default.
• W2339460983 hasConceptScore W2339460983C185592680 @default.
• W2339460983 hasConceptScore W2339460983C191952053 @default.
• W2339460983 hasConceptScore W2339460983C192562407 @default.
• W2339460983 hasConceptScore W2339460983C2776921476 @default.
• W2339460983 hasConceptScore W2339460983C43617362 @default.
• W2339460983 hasConceptScore W2339460983C49040817 @default.
• W2339460983 hasConceptScore W2339460983C501308230 @default.
• W2339460983 hasConceptScore W2339460983C57410435 @default.
• W2339460983 hasConceptScore W2339460983C57863236 @default.
• W2339460983 hasIssue "4" @default.
• W2339460983 hasLocation W23394609831 @default.
• W2339460983 hasOpenAccess W2339460983 @default.
• W2339460983 hasPrimaryLocation W23394609831 @default.
• W2339460983 hasRelatedWork W1966205888 @default.
• W2339460983 hasRelatedWork W1977225004 @default.
• W2339460983 hasRelatedWork W2024498047 @default.
• W2339460983 hasRelatedWork W2048443593 @default.
• W2339460983 hasRelatedWork W2054379190 @default.
• W2339460983 hasRelatedWork W2079738828 @default.
• W2339460983 hasRelatedWork W2383304879 @default.
• W2339460983 hasRelatedWork W262072030 @default.

• next