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- W2339953242 abstract "Dicke und Zusammensetzung der während der B-Abscheidung aus festem BN wachsenden mit Bangereicherten Schicht wird als Funktion der O2-Konzentration in der Gasphase (trockner N2) während der Abkühlungsphase (vor dem Diffusionsschritt) untersucht." @default.
- W2339953242 created "2016-06-24" @default.
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- W2339953242 date "1980-02-26" @default.
- W2339953242 modified "2023-09-24" @default.
- W2339953242 title "ChemInform Abstract: AUGER ELECTRON SPECTROSCOPY (AES) STUDY OF BORON DIFFUSION IN SILICON FROM A BORON NITRIDE SOURCE WITH HYDROGEN INJECTION" @default.
- W2339953242 cites W2032443578 @default.
- W2339953242 doi "https://doi.org/10.1002/chin.198008006" @default.
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