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- W2340987035 abstract "The Micro Electro Mechanical Systems (MEMS) are amo ng the most promising areas in future com- puter and machinery, the next logical step in the srevolution. But the MEMS industry is current ly at a much more vulnerable position than it appears, rega rdless of how wonderful its future may looks like. A full un- derstanding of the physics and statistics of the de fect generation is required to investigate the ultimate reliability limitations for MEMS. Biggest challenge: cost effec tive, high volume production. Within MEMS technolog ical expansion, device manufacturing costs, failure and long-term performance reliability are critical issu es that have to be resolved using basic probabilistic desig n methodologies which are largely unexploited by in dustrial companies at the mature innovation level. There are a number of factors that contribute to the reliabi lity of MEMS: packaging (in particular, in bonding and seal ing), material characterization relating to operati ng and environmental conditions, credible design considera tions, the techniques for mitigating intrinsic stresses/strains induced by fabrications and testing for reliability are a few of these factors. The reliability aspect includes both the electronic and the mechanical parts, complicate d by the interactions. Reliability is a critical issue in any in- dustrial and consumer product development. MEMS dev ices are becoming essential components of modern en - gineering systems and their reliability is of parti cular importance in applications where their failur e can be cat- astrophic and devastating." @default.
- W2340987035 created "2016-06-24" @default.
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- W2340987035 date "2012-01-01" @default.
- W2340987035 modified "2023-09-27" @default.
- W2340987035 title "MEMS MANUFACTURING AND RELIABILITY" @default.
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