Matches in SemOpenAlex for { <https://semopenalex.org/work/W2341293683> ?p ?o ?g. }
- W2341293683 endingPage "041602" @default.
- W2341293683 startingPage "041602" @default.
- W2341293683 abstract "Characterization of the systematic and random dose errors of an extreme ultraviolet (EUV) exposure system is performed using an EUV resist as an energy sensor for fast and repeatable measurements. Dose error measurement is enabled by a critical phenomenon that occurs when the photoresist is exposed to a dose in the region between the onset dose of E1 and the clearing dose of E0 on the photoresist contrast curve, which results in enhanced sensitivity to the applied dose relative to the resist thickness. At doses near the enhanced sensitivity point, changes in the thickness of the photoresist can be detected based on the change in the reflected light intensity, and any intensity variations in a captured image of an exposed wafer can be reverse translated into the dose error of the exposure system. With a dose sensitivity that is capable of resolving approximately 0.25% of the nominal dose, it is possible to decompose the measured systematic in-band EUV dose error of the exposure system into the intrafield slit and scan uniformity, the field-to-field variation within a wafer, the scan-up to scan-down difference, and the chuck-to-chuck difference. Even a random dose error, such as the intermittent pulse energy drop-out error that occurs in laser-produced plasma EUV sources, can be detected." @default.
- W2341293683 created "2016-06-24" @default.
- W2341293683 creator A5021514540 @default.
- W2341293683 creator A5028245046 @default.
- W2341293683 creator A5070926209 @default.
- W2341293683 creator A5072937141 @default.
- W2341293683 creator A5078550943 @default.
- W2341293683 creator A5089899060 @default.
- W2341293683 date "2016-07-01" @default.
- W2341293683 modified "2023-09-25" @default.
- W2341293683 title "Dose performance characterization of extreme ultraviolet exposure system using enhanced energy sensitivity by resist contrast method" @default.
- W2341293683 cites W1964706464 @default.
- W2341293683 cites W1965618765 @default.
- W2341293683 cites W1969520063 @default.
- W2341293683 cites W1969559622 @default.
- W2341293683 cites W1976722177 @default.
- W2341293683 cites W1977132029 @default.
- W2341293683 cites W1992574978 @default.
- W2341293683 cites W1993096832 @default.
- W2341293683 cites W1994022596 @default.
- W2341293683 cites W1994663676 @default.
- W2341293683 cites W1998172195 @default.
- W2341293683 cites W2005394878 @default.
- W2341293683 cites W2008746391 @default.
- W2341293683 cites W2009671293 @default.
- W2341293683 cites W2014077363 @default.
- W2341293683 cites W2016928767 @default.
- W2341293683 cites W2027095012 @default.
- W2341293683 cites W2030589337 @default.
- W2341293683 cites W2034718861 @default.
- W2341293683 cites W2040522673 @default.
- W2341293683 cites W2057006658 @default.
- W2341293683 cites W2063355164 @default.
- W2341293683 cites W2066044166 @default.
- W2341293683 cites W2069914735 @default.
- W2341293683 cites W2070133226 @default.
- W2341293683 cites W2080416894 @default.
- W2341293683 cites W2080875396 @default.
- W2341293683 cites W2080957747 @default.
- W2341293683 cites W2082562377 @default.
- W2341293683 cites W2087129835 @default.
- W2341293683 cites W2090786984 @default.
- W2341293683 cites W2091325457 @default.
- W2341293683 cites W2096384080 @default.
- W2341293683 cites W2104212315 @default.
- W2341293683 cites W2106658793 @default.
- W2341293683 cites W2114131053 @default.
- W2341293683 cites W2117575741 @default.
- W2341293683 cites W2121865050 @default.
- W2341293683 cites W2141556703 @default.
- W2341293683 cites W2159352565 @default.
- W2341293683 cites W2163282876 @default.
- W2341293683 cites W2166990215 @default.
- W2341293683 cites W2167315309 @default.
- W2341293683 cites W2099813068 @default.
- W2341293683 doi "https://doi.org/10.1116/1.4945806" @default.
- W2341293683 hasPublicationYear "2016" @default.
- W2341293683 type Work @default.
- W2341293683 sameAs 2341293683 @default.
- W2341293683 citedByCount "4" @default.
- W2341293683 countsByYear W23412936832017 @default.
- W2341293683 countsByYear W23412936832018 @default.
- W2341293683 crossrefType "journal-article" @default.
- W2341293683 hasAuthorship W2341293683A5021514540 @default.
- W2341293683 hasAuthorship W2341293683A5028245046 @default.
- W2341293683 hasAuthorship W2341293683A5070926209 @default.
- W2341293683 hasAuthorship W2341293683A5072937141 @default.
- W2341293683 hasAuthorship W2341293683A5078550943 @default.
- W2341293683 hasAuthorship W2341293683A5089899060 @default.
- W2341293683 hasConcept C120665830 @default.
- W2341293683 hasConcept C121332964 @default.
- W2341293683 hasConcept C127413603 @default.
- W2341293683 hasConcept C134406635 @default.
- W2341293683 hasConcept C146024833 @default.
- W2341293683 hasConcept C160671074 @default.
- W2341293683 hasConcept C162996421 @default.
- W2341293683 hasConcept C171250308 @default.
- W2341293683 hasConcept C192562407 @default.
- W2341293683 hasConcept C21200559 @default.
- W2341293683 hasConcept C24326235 @default.
- W2341293683 hasConcept C2779227376 @default.
- W2341293683 hasConcept C49040817 @default.
- W2341293683 hasConcept C520434653 @default.
- W2341293683 hasConcept C53524968 @default.
- W2341293683 hasConceptScore W2341293683C120665830 @default.
- W2341293683 hasConceptScore W2341293683C121332964 @default.
- W2341293683 hasConceptScore W2341293683C127413603 @default.
- W2341293683 hasConceptScore W2341293683C134406635 @default.
- W2341293683 hasConceptScore W2341293683C146024833 @default.
- W2341293683 hasConceptScore W2341293683C160671074 @default.
- W2341293683 hasConceptScore W2341293683C162996421 @default.
- W2341293683 hasConceptScore W2341293683C171250308 @default.
- W2341293683 hasConceptScore W2341293683C192562407 @default.
- W2341293683 hasConceptScore W2341293683C21200559 @default.
- W2341293683 hasConceptScore W2341293683C24326235 @default.
- W2341293683 hasConceptScore W2341293683C2779227376 @default.
- W2341293683 hasConceptScore W2341293683C49040817 @default.
- W2341293683 hasConceptScore W2341293683C520434653 @default.