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- W2342272443 abstract "ABSTRACTThe paper proposes protective silicon-silicon oxide thin film for integrated optical circuits (IOC) based on lithium niobate. Threshold values for silicon layer thickness were experimentally determined. Silicon-silicon oxide layers were deposited on IOC samples with combination of DC unipolar pulsed magnetron sputtering, reactive magnetron sputtering, and plasma enhanced chemical vapor deposition with inductively coupled plasma source (ICP-PECVD). Selection of proper deposition regimes allowed us to obtain thin films demonstrating no attenuation of optical signal." @default.
- W2342272443 created "2016-06-24" @default.
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- W2342272443 date "2016-04-15" @default.
- W2342272443 modified "2023-09-24" @default.
- W2342272443 title "Protective silicon-silicon oxide magnetron sputtered layer for lithium niobate integrated optical circuits" @default.
- W2342272443 cites W1566681721 @default.
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- W2342272443 doi "https://doi.org/10.1080/00150193.2016.1157734" @default.
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