FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2342653807> ?p ?o ?g. }

• W2342653807 endingPage "P72" @default.
• W2342653807 startingPage "P67" @default.
• W2342653807 abstract "Atomically flattening technology was introduced to the widely used complementary metal oxide silicon process employing sallow trench isolation at the 0.22-μm technology node. Two methods were investigated. The first method is to apply the atomically flattening to the starting Si wafer, and the second method is to apply this just before forming the gate oxide. In both methods, atomically flat gate insulator/Si interface could be obtained, and the test array circuit for evaluating the electrical characteristics of many (>130,000) metal oxide semiconductor field effect transistors was successfully fabricated on an entire 200-mm-diameter wafer. By evaluating the test circuit, the noise amplitude of the gate–source voltage related to the random telegraph noise was reduced owing to introducing the atomically flat gate insulator/Si interface. The charge-to-breakdown of the gate oxide was also improved." @default.
• W2342653807 created "2016-06-24" @default.
• W2342653807 creator A5002768298 @default.
• W2342653807 creator A5009232538 @default.
• W2342653807 creator A5017855642 @default.
• W2342653807 creator A5033865372 @default.
• W2342653807 creator A5059412772 @default.
• W2342653807 creator A5059641768 @default.
• W2342653807 creator A5063823234 @default.
• W2342653807 creator A5065336642 @default.
• W2342653807 creator A5075071744 @default.
• W2342653807 creator A5076720261 @default.
• W2342653807 creator A5078307382 @default.
• W2342653807 creator A5086436144 @default.
• W2342653807 date "2015-11-24" @default.
• W2342653807 modified "2023-09-24" @default.
• W2342653807 title "Introduction of Atomically Flattening of Si Surface to Large-Scale Integration Process Employing Shallow Trench Isolation" @default.
• W2342653807 cites W1982142660 @default.
• W2342653807 cites W1982584359 @default.
• W2342653807 cites W2004372722 @default.
• W2342653807 cites W2009883498 @default.
• W2342653807 cites W2011541950 @default.
• W2342653807 cites W2023869812 @default.
• W2342653807 cites W2052152282 @default.
• W2342653807 cites W2068180043 @default.
• W2342653807 cites W2071915747 @default.
• W2342653807 cites W2080303817 @default.
• W2342653807 cites W2083508236 @default.
• W2342653807 cites W2084782197 @default.
• W2342653807 cites W2106482808 @default.
• W2342653807 cites W2109109523 @default.
• W2342653807 cites W2109856880 @default.
• W2342653807 cites W2124782339 @default.
• W2342653807 cites W2131034210 @default.
• W2342653807 cites W2136162399 @default.
• W2342653807 cites W2139424966 @default.
• W2342653807 cites W2142718365 @default.
• W2342653807 cites W2158021297 @default.
• W2342653807 cites W2172037169 @default.
• W2342653807 cites W2199661605 @default.
• W2342653807 cites W2278273127 @default.
• W2342653807 cites W2319491550 @default.
• W2342653807 cites W2342007082 @default.
• W2342653807 cites W4239796113 @default.
• W2342653807 cites W4241039558 @default.
• W2342653807 cites W4251367742 @default.
• W2342653807 doi "https://doi.org/10.1149/2.0221602jss" @default.
• W2342653807 hasPublicationYear "2015" @default.
• W2342653807 type Work @default.
• W2342653807 sameAs 2342653807 @default.
• W2342653807 citedByCount "5" @default.
• W2342653807 countsByYear W23426538072016 @default.
• W2342653807 countsByYear W23426538072017 @default.
• W2342653807 countsByYear W23426538072020 @default.
• W2342653807 countsByYear W23426538072021 @default.
• W2342653807 crossrefType "journal-article" @default.
• W2342653807 hasAuthorship W2342653807A5002768298 @default.
• W2342653807 hasAuthorship W2342653807A5009232538 @default.
• W2342653807 hasAuthorship W2342653807A5017855642 @default.
• W2342653807 hasAuthorship W2342653807A5033865372 @default.
• W2342653807 hasAuthorship W2342653807A5059412772 @default.
• W2342653807 hasAuthorship W2342653807A5059641768 @default.
• W2342653807 hasAuthorship W2342653807A5063823234 @default.
• W2342653807 hasAuthorship W2342653807A5065336642 @default.
• W2342653807 hasAuthorship W2342653807A5075071744 @default.
• W2342653807 hasAuthorship W2342653807A5076720261 @default.
• W2342653807 hasAuthorship W2342653807A5078307382 @default.
• W2342653807 hasAuthorship W2342653807A5086436144 @default.
• W2342653807 hasConcept C105066941 @default.
• W2342653807 hasConcept C119599485 @default.
• W2342653807 hasConcept C127413603 @default.
• W2342653807 hasConcept C155310634 @default.
• W2342653807 hasConcept C159985019 @default.
• W2342653807 hasConcept C160671074 @default.
• W2342653807 hasConcept C165801399 @default.
• W2342653807 hasConcept C171250308 @default.
• W2342653807 hasConcept C172385210 @default.
• W2342653807 hasConcept C191897082 @default.
• W2342653807 hasConcept C192562407 @default.
• W2342653807 hasConcept C19444555 @default.
• W2342653807 hasConcept C2361726 @default.
• W2342653807 hasConcept C2779227376 @default.
• W2342653807 hasConcept C2779851234 @default.
• W2342653807 hasConcept C49040817 @default.
• W2342653807 hasConcept C53143962 @default.
• W2342653807 hasConcept C544956773 @default.
• W2342653807 hasConceptScore W2342653807C105066941 @default.
• W2342653807 hasConceptScore W2342653807C119599485 @default.
• W2342653807 hasConceptScore W2342653807C127413603 @default.
• W2342653807 hasConceptScore W2342653807C155310634 @default.
• W2342653807 hasConceptScore W2342653807C159985019 @default.
• W2342653807 hasConceptScore W2342653807C160671074 @default.
• W2342653807 hasConceptScore W2342653807C165801399 @default.
• W2342653807 hasConceptScore W2342653807C171250308 @default.
• W2342653807 hasConceptScore W2342653807C172385210 @default.
• W2342653807 hasConceptScore W2342653807C191897082 @default.
• W2342653807 hasConceptScore W2342653807C192562407 @default.
• W2342653807 hasConceptScore W2342653807C19444555 @default.

• next