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- W2342674017 abstract "While both molecular fluorine (F₂) and xenondifluoride (XeF₂) fluorinate Si(l00)2xI surfaces at coverages up toone monolayer, fluorine is unable to cleave Si-Si bonds thatultimately leads to etching silicon at coverages above onemonolayer (reaction probability 9x 10-⁴) while XeF₂ does so readily(reaction probability 0.6). Previous studies have demonstrated thatboth fluorine and xenon difluoride react with silicon viaatom-abstraction mechanisms at low coverages, and that the XeFradicals produced by atom abstraction from xenon difluoridedissociate in the gas phase, producing a source of F radicals thatmay contribute to Si-Si bond cleavage by formation of multiple F-Sibonds. In addition, it has been shown that van der Waals clustersof F₂ with a Xe atom and with a Kr atom have reaction probabilitieswith silicon at one monolayer of fluorine coverage of roughly 0.9and 0.04, respectively, suggesting that the effect of mass of theincident gas molecules is important in activating the cleavage ofsilicon-silicon bonds through a multiple collision process. A modelbased on a classical harmonic oscillator linked via a variabledamping term to the thermal energy of the lattice is proposed totest the importance of the mass of the gas molecules to energytransfer and the duration of the vibrational excitation of thesilicon-silicon lattice bonds. Computer simulations using thismodel suggest that the mass of the gas molecule does not affect theoverall energy transferred to the silicon. However, the heavy massand the resulting multiple collisions do extend the duration of thesilicon excitation and the duration during which the gas moleculeis in contact with the vibrationally excited silicon lattice. Thetechniques that have been used to study the reactivity of fluorinecompounds with silicon are potentially of use to the study ofanother problem: why triplet molecular oxygen (O₂ ) is able todissociatively chemisorb across singlet silicon-silicon dimer bondsto form the singlet Si-O product. Several mechanisms, includingatom abstraction and non-adiabatic ladder climbing of (O₂ )₂ vander Waals dimers are suggested to explain this reaction and aseries of experiments to test the hypothesized mechanisms areproposed. In addition, a detailed account of the ultra-high-vacuummolecular beam surface scattering apparatus used for these studiesis provided, including a detailed description of its operation andmaintenance procedures." @default.
- W2342674017 created "2016-06-24" @default.
- W2342674017 creator A5043205274 @default.
- W2342674017 date "2015-01-01" @default.
- W2342674017 modified "2023-09-26" @default.
- W2342674017 title "Xenon difluoride etching and molecular oxygen oxidation of silicon by reactive scattering" @default.
- W2342674017 hasPublicationYear "2015" @default.
- W2342674017 type Work @default.
- W2342674017 sameAs 2342674017 @default.
- W2342674017 citedByCount "0" @default.
- W2342674017 crossrefType "dissertation" @default.
- W2342674017 hasAuthorship W2342674017A5043205274 @default.
- W2342674017 hasConcept C121332964 @default.
- W2342674017 hasConcept C147789679 @default.
- W2342674017 hasConcept C178790620 @default.
- W2342674017 hasConcept C184779094 @default.
- W2342674017 hasConcept C185592680 @default.
- W2342674017 hasConcept C2777639234 @default.
- W2342674017 hasConcept C32909587 @default.
- W2342674017 hasConcept C506198293 @default.
- W2342674017 hasConcept C544956773 @default.
- W2342674017 hasConcept C548442186 @default.
- W2342674017 hasConcept C55493867 @default.
- W2342674017 hasConcept C7070889 @default.
- W2342674017 hasConcept C75473681 @default.
- W2342674017 hasConceptScore W2342674017C121332964 @default.
- W2342674017 hasConceptScore W2342674017C147789679 @default.
- W2342674017 hasConceptScore W2342674017C178790620 @default.
- W2342674017 hasConceptScore W2342674017C184779094 @default.
- W2342674017 hasConceptScore W2342674017C185592680 @default.
- W2342674017 hasConceptScore W2342674017C2777639234 @default.
- W2342674017 hasConceptScore W2342674017C32909587 @default.
- W2342674017 hasConceptScore W2342674017C506198293 @default.
- W2342674017 hasConceptScore W2342674017C544956773 @default.
- W2342674017 hasConceptScore W2342674017C548442186 @default.
- W2342674017 hasConceptScore W2342674017C55493867 @default.
- W2342674017 hasConceptScore W2342674017C7070889 @default.
- W2342674017 hasConceptScore W2342674017C75473681 @default.
- W2342674017 hasLocation W23426740171 @default.
- W2342674017 hasOpenAccess W2342674017 @default.
- W2342674017 hasPrimaryLocation W23426740171 @default.
- W2342674017 hasRelatedWork W1676049638 @default.
- W2342674017 hasRelatedWork W1969785462 @default.
- W2342674017 hasRelatedWork W1983433740 @default.
- W2342674017 hasRelatedWork W1998989103 @default.
- W2342674017 hasRelatedWork W2008039863 @default.
- W2342674017 hasRelatedWork W2009724218 @default.
- W2342674017 hasRelatedWork W2016548882 @default.
- W2342674017 hasRelatedWork W2023593599 @default.
- W2342674017 hasRelatedWork W2034140769 @default.
- W2342674017 hasRelatedWork W2041361723 @default.
- W2342674017 hasRelatedWork W2043836881 @default.
- W2342674017 hasRelatedWork W2048783205 @default.
- W2342674017 hasRelatedWork W2054783545 @default.
- W2342674017 hasRelatedWork W2069287770 @default.
- W2342674017 hasRelatedWork W2080402582 @default.
- W2342674017 hasRelatedWork W2094755153 @default.
- W2342674017 hasRelatedWork W2109072482 @default.
- W2342674017 hasRelatedWork W2166863877 @default.
- W2342674017 hasRelatedWork W2320543207 @default.
- W2342674017 hasRelatedWork W266628518 @default.
- W2342674017 isParatext "false" @default.
- W2342674017 isRetracted "false" @default.
- W2342674017 magId "2342674017" @default.
- W2342674017 workType "dissertation" @default.