Matches in SemOpenAlex for { <https://semopenalex.org/work/W2343096789> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2343096789 abstract "The huge increase of datacom capacities requires lasers sources with more and more bandwidth performances. Vertical-Cavity Surface-Emitting Lasers (VCSEL) in direct modulation is a good candidate, already widely used for short communication links such as in datacenters. Recently several different approaches have been proposed to further extend the direct modulation bandwidth of these devices, by improving the VCSEL structure, or by combining the VCSEL with another high speed element such as lateral slow light modulator or transistor/laser based structure (TVCSEL). We propose to increase the modulation bandwidth by vertically integrating a continuous-wave VCSEL with a high-speed electro-modulator. This vertical structure implies multiple electrodes with sufficiently good electrical separation between the different input electrical signals. This high frequency modulation requires both good electrical insulation between metal electrodes and an optimized design of the coplanar lines. BenzoCyclobutene (BCB) thanks to its low dielectric constant, low losses, low moisture absorption and good thermal stability, is often used as insulating layer. Also, BCB planarization offers the advantages of simpler and more reliable technological process flow in such integrated VCSEL/modulator structures with important reliefs. As described by Burdeaux et al. a degree of planarization (DOP) of about 95% can be achieved by simple spin coating whatever the device thickness. In most of the cases, the BCB planarization process requires an additional photolithography step in order to open an access to the mesa surface, thus involving a tight mask alignment and resulting in a degraded planarization. In this paper, we propose a self-aligned process with improved BCB planarization by combining a hot isostatic pressing derived from nanoimprint techniques with a dry plasma etching step." @default.
- W2343096789 created "2016-06-24" @default.
- W2343096789 creator A5000691620 @default.
- W2343096789 creator A5009633879 @default.
- W2343096789 creator A5022375508 @default.
- W2343096789 creator A5031676989 @default.
- W2343096789 creator A5067643219 @default.
- W2343096789 creator A5068563231 @default.
- W2343096789 creator A5068567201 @default.
- W2343096789 creator A5080800242 @default.
- W2343096789 date "2016-04-28" @default.
- W2343096789 modified "2023-10-18" @default.
- W2343096789 title "Self-aligned BCB planarization method for high-frequency signal injection in a VCSEL with an integrated modulator" @default.
- W2343096789 cites W1929018748 @default.
- W2343096789 cites W1963666834 @default.
- W2343096789 cites W1980638156 @default.
- W2343096789 cites W1982220459 @default.
- W2343096789 cites W2055460019 @default.
- W2343096789 cites W2057092444 @default.
- W2343096789 cites W2057134100 @default.
- W2343096789 cites W2089783490 @default.
- W2343096789 cites W777084966 @default.
- W2343096789 doi "https://doi.org/10.1117/12.2227529" @default.
- W2343096789 hasPublicationYear "2016" @default.
- W2343096789 type Work @default.
- W2343096789 sameAs 2343096789 @default.
- W2343096789 citedByCount "2" @default.
- W2343096789 countsByYear W23430967892017 @default.
- W2343096789 countsByYear W23430967892022 @default.
- W2343096789 crossrefType "proceedings-article" @default.
- W2343096789 hasAuthorship W2343096789A5000691620 @default.
- W2343096789 hasAuthorship W2343096789A5009633879 @default.
- W2343096789 hasAuthorship W2343096789A5022375508 @default.
- W2343096789 hasAuthorship W2343096789A5031676989 @default.
- W2343096789 hasAuthorship W2343096789A5067643219 @default.
- W2343096789 hasAuthorship W2343096789A5068563231 @default.
- W2343096789 hasAuthorship W2343096789A5068567201 @default.
- W2343096789 hasAuthorship W2343096789A5080800242 @default.
- W2343096789 hasConcept C106246969 @default.
- W2343096789 hasConcept C11930861 @default.
- W2343096789 hasConcept C120665830 @default.
- W2343096789 hasConcept C121332964 @default.
- W2343096789 hasConcept C123079801 @default.
- W2343096789 hasConcept C138113353 @default.
- W2343096789 hasConcept C159985019 @default.
- W2343096789 hasConcept C180088628 @default.
- W2343096789 hasConcept C192562407 @default.
- W2343096789 hasConcept C199360897 @default.
- W2343096789 hasConcept C24890656 @default.
- W2343096789 hasConcept C2779843651 @default.
- W2343096789 hasConcept C41008148 @default.
- W2343096789 hasConcept C49040817 @default.
- W2343096789 hasConcept C520434653 @default.
- W2343096789 hasConcept C74064498 @default.
- W2343096789 hasConcept C76155785 @default.
- W2343096789 hasConceptScore W2343096789C106246969 @default.
- W2343096789 hasConceptScore W2343096789C11930861 @default.
- W2343096789 hasConceptScore W2343096789C120665830 @default.
- W2343096789 hasConceptScore W2343096789C121332964 @default.
- W2343096789 hasConceptScore W2343096789C123079801 @default.
- W2343096789 hasConceptScore W2343096789C138113353 @default.
- W2343096789 hasConceptScore W2343096789C159985019 @default.
- W2343096789 hasConceptScore W2343096789C180088628 @default.
- W2343096789 hasConceptScore W2343096789C192562407 @default.
- W2343096789 hasConceptScore W2343096789C199360897 @default.
- W2343096789 hasConceptScore W2343096789C24890656 @default.
- W2343096789 hasConceptScore W2343096789C2779843651 @default.
- W2343096789 hasConceptScore W2343096789C41008148 @default.
- W2343096789 hasConceptScore W2343096789C49040817 @default.
- W2343096789 hasConceptScore W2343096789C520434653 @default.
- W2343096789 hasConceptScore W2343096789C74064498 @default.
- W2343096789 hasConceptScore W2343096789C76155785 @default.
- W2343096789 hasLocation W23430967891 @default.
- W2343096789 hasLocation W23430967892 @default.
- W2343096789 hasOpenAccess W2343096789 @default.
- W2343096789 hasPrimaryLocation W23430967891 @default.
- W2343096789 hasRelatedWork W1814844523 @default.
- W2343096789 hasRelatedWork W1996307611 @default.
- W2343096789 hasRelatedWork W2004217881 @default.
- W2343096789 hasRelatedWork W2012379450 @default.
- W2343096789 hasRelatedWork W2079000619 @default.
- W2343096789 hasRelatedWork W2103562752 @default.
- W2343096789 hasRelatedWork W2317353427 @default.
- W2343096789 hasRelatedWork W2391181129 @default.
- W2343096789 hasRelatedWork W2800816836 @default.
- W2343096789 hasRelatedWork W284695803 @default.
- W2343096789 isParatext "false" @default.
- W2343096789 isRetracted "false" @default.
- W2343096789 magId "2343096789" @default.
- W2343096789 workType "article" @default.