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- W2343494627 abstract "Carbon coils could be synthesized using C 2 H 2 /H 2 as source gases and SF 6 as an incorporated additive gas under thermal chemical vapor deposition system. Bunch-type large-sized (100 ~ 200 μm in diameter) Ni grains were used as the catalyst for the formation of the carbon coils. According to the different reaction processes, the injection time of SF 6 gas flow was varied from 1.0 min to 60 min. The characteristics (formation density, morphology, and geometry) of the deposited carbon coils on the substrates were investigated according to the different reaction processes. Finally, both the high production yield of carbon coils and their geometry control could be achieved merely by manipulating SF 6 gas flow injection time. Two cases growth patterns were proposed according to SF 6 gas flow injection time in association with the fluorine’s characteristics for etching the materials or enhancing the nucleation sites." @default.
- W2343494627 created "2016-06-24" @default.
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- W2343494627 date "2016-04-01" @default.
- W2343494627 modified "2023-09-27" @default.
- W2343494627 title "Effect of the SF<sub>6</sub> Flow Injection Time on the Formation of the Carbon Coils" @default.
- W2343494627 doi "https://doi.org/10.4028/www.scientific.net/kem.689.48" @default.
- W2343494627 hasPublicationYear "2016" @default.
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