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- W2343734054 abstract "Annealing studies have been carried out for high temperature superconductor YBaCuO{sub 7{minus}{delta}} in a reducing ambient, in order to identify insulator layer(s) that will effectively protect the superconducting film in the hostile environment. While a layer of magnesium oxide (MgO) sputter deposited directly on YBaCuO{sub 7{minus}{delta}} film provides some degree of protection, the authors found that a composite structure of YBCO/SrTiO{sub 3}/MgO, where the SrTiO{sub 3} was grown by laser ablation immediately following YBCO deposition (in-situ process), was much more effective. They also address the need for a buffer layer between YBCO and aluminum (Al) during annealing. Al is most commenly used for semiconductor metalization, but is known to react readily with YBCO at elevated temperatures. The authors found that the most effective buffer layers are platinum (Pt) and gold/platinum (Au/Pt)." @default.
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- W2343734054 date "1996-12-31" @default.
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- W2343734054 title "Protection of high temperature superconducting thin-films in a semiconductor processing environment" @default.
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