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- W2344333772 abstract "This paper describes a concept for designing a projection lens in lithographic optical system for 365 nm. Our approach for meeting this objective is to use the starting design obtained by artificial intelligence mode in Synopsys software. The proposed method describes the steps of getting a desired starting point of the optical system and the optimization problems in the optical system with a high numerical aperture." @default.
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- W2344333772 date "2016-01-01" @default.
- W2344333772 modified "2023-09-28" @default.
- W2344333772 title "A Concept of Ultraviolet Lithography System and Design of its Rear Part using Artificial Intelligence for Starting Design" @default.
- W2344333772 doi "https://doi.org/10.5220/0005688500820086" @default.
- W2344333772 hasPublicationYear "2016" @default.
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