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• W2344546967 abstract "The role of atom probe tomography in the investigation of clustering and segregation of dopants to lattice defects in semiconductors is highlighted on the basis of some selected salient illustrations obtained at the Groupe de Physique des Matériaux of Rouen (France). The instrument is shown to be able to map out the 3D distribution of chemical species in the three dimensions of space at the ultimate scale. Results related to clustering, segregation of dopants (As, B, and P) to grain boundaries, dislocation loops, and extended defects in silicon are discussed." @default.
• W2344546967 created "2016-06-24" @default.
• W2344546967 creator A5029686197 @default.
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• W2344546967 date "2016-04-29" @default.
• W2344546967 modified "2023-09-27" @default.
• W2344546967 title "Investigation of dopant clustering and segregation to defects in semiconductors using atom probe tomography" @default.
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• W2344546967 doi "https://doi.org/10.1063/1.4948238" @default.
• W2344546967 hasPublicationYear "2016" @default.
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