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• W2345801819 endingPage "83" @default.
• W2345801819 startingPage "83" @default.
• W2345801819 abstract "In this study, we developed a method for fabricating a microfluidic device with integrated large-scale all-glass valves and constructed an actuator system to control each of the valves on the device. Such a microfluidic device has advantages that allow its use in various fields, including physical, chemical, and biochemical analyses and syntheses. However, it is inefficient and difficult to integrate the large-scale all-glass valves in a microfluidic device using conventional glass fabrication methods, especially for the through-hole fabrication step. Therefore, we have developed a fabrication method for the large-scale integration of all-glass valves in a microfluidic device that contains 110 individually controllable diaphragm valve units on a 30 mm × 70 mm glass slide. This prototype device was fabricated by first sandwiching a 0.4-mm-thick glass slide that contained 110 1.5-mm-diameter shallow chambers, each with two 50-μm-diameter through-holes, between an ultra-thin glass sheet (4 μm thick) and another 0.7-mm-thick glass slide that contained etched channels. After the fusion bonding of these three layers, the large-scale microfluidic device was obtained with integrated all-glass valves consisting of 110 individual diaphragm valve units. We demonstrated its use as a pump capable of generating a flow rate of approximately 0.06–5.33 μL/min. The maximum frequency of flow switching was approximately 12 Hz." @default.
• W2345801819 created "2016-06-24" @default.
• W2345801819 creator A5003587406 @default.
• W2345801819 creator A5085381042 @default.
• W2345801819 date "2016-05-06" @default.
• W2345801819 modified "2023-10-18" @default.
• W2345801819 title "Large-Scale Integration of All-Glass Valves on a Microfluidic Device" @default.
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• W2345801819 doi "https://doi.org/10.3390/mi7050083" @default.
• W2345801819 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/6190260" @default.
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• W2345801819 hasPublicationYear "2016" @default.
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