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- W2347220601 abstract "This paper presented a novel method for generating reduced-order model(ROM) for the polysilicon-silicon nitride cantilever.The cantilever was curved under the residual stress of Silicon Nitride,and the cantilever was pulled after the execution of a potential between it and the substrate.When the potential exceeded the pull-in voltage,the cantilever was pulled down to the substrate.ROM extracted the eigenmodes and their contribution factors.The coupled-physics domain was represented by a factored sum of mode shapes.So the problem was simplified and the operation quantity was greatly reduced.The calculated results for the height of the cantilever tip,first mode frequency and pull-in voltage are in good agreement with experimental results." @default.
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- W2347220601 date "2005-01-01" @default.
- W2347220601 modified "2023-09-27" @default.
- W2347220601 title "Research on Mechanical Properties of MEMS Cantilever Actuator Based on the Reduced Order Modeling" @default.
- W2347220601 hasPublicationYear "2005" @default.
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