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- W2347370546 abstract "The complex chemical reactions in the Si-Cl-H system with relation to Siemens process were studied by means of calculation based on the thermodynamic data selection. Diagrams of △rGm and Kp for the fifteen chemical reactions in this system versus temperature were plotted; diagrams of the equilibrium gas phase composition and η-yield were presented as a function of temperature for different total pressure and initial molar ratio of SiHCl_3/H_2; diagrams of α-yield were presented as a function of initial molar fraction (x_4~0) of SiHCl_3 for different total pressures. The results from this thermodynamic study show that high temperature, low pressure and low initial molar ratio of SiHCl_3/H_2 are favourable to the reduction of SiHCl_3 by H_2 and α-factor of Si increases with initial molar fraction (x_4~0) of SiHCl_3 increasing." @default.
- W2347370546 created "2016-06-24" @default.
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- W2347370546 date "2007-01-01" @default.
- W2347370546 modified "2023-09-29" @default.
- W2347370546 title "Thermodynamic Study on Production of the Multicrystalline Silicon by Siemens Process" @default.
- W2347370546 hasPublicationYear "2007" @default.
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