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- W2347392139 abstract "According to our chamber condition,the kinematic model was established for Silicon particulates,and figures of the relationship among the falling timediameter of Silicon particulates and the gas flow rates was protracted.The particulate diameters of 70-120μm,gas flow rates from 4-10L/s were chosen with the model and the figures.For the purpose of enhancing the effect of purity,the sheath model was established.The technology parameters related to the thickness,the ions density in the sheath area and the average kinetic energy of ions were analyzed on the basis of the sheath model.A method of choosing the technology parameters was provided.A sheath thickness of 1.2-2cm,the total chamber pressure from 4-6Pa and DC self-bias voltage of higher than 2000V were chosen using this method.The experimental results of etching purity showed the purity of Si powder can be increased from 99.6% to 99.95%." @default.
- W2347392139 created "2016-06-24" @default.
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- W2347392139 date "2007-01-01" @default.
- W2347392139 modified "2023-09-23" @default.
- W2347392139 title "Technology parameters for Si particulates purity in DC Ar plasma" @default.
- W2347392139 hasPublicationYear "2007" @default.
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