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- W2347658297 abstract "Airborne Molecular Contaminants(AMC) have a potential to adversely affect micro-electronics manufacturing process,reducing yields.More information about AMC can be obtained if a traditional test method is combined with some new methods,Gigacheck and Gigamonitor.Chemical filter is one of most effective measures to remove AMC.To provide an effective chemical filtration solution for specific target AMC removal,not only based on main performance parameters of the filter,such as adsorptive efficiency and adsorptive capacity,but also on the test for a full-scale chemical filter on a Chemical Filter Test Rig." @default.
- W2347658297 created "2016-06-24" @default.
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- W2347658297 date "2005-01-01" @default.
- W2347658297 modified "2023-09-23" @default.
- W2347658297 title "Effective Control of AMC by Molecular Filtration" @default.
- W2347658297 hasPublicationYear "2005" @default.
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