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- W2347705842 abstract "The technology research of mold for microfluidic chips by SU-8 photoresist is described.Effects of factors of processes including prebake,bake,photo lithography,develop and so on,on mold are discussed.A reference for mold making process is proposed,and anti-adhesive layer process is discussed too.Further,reactive ion etching(RIE)is used to improve the adhesion between SU-8 and the silicon substrate.Finally,through above technology studies,mold used in fluid and microfluid chip are produced successfully." @default.
- W2347705842 created "2016-06-24" @default.
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- W2347705842 date "2013-01-01" @default.
- W2347705842 modified "2023-09-25" @default.
- W2347705842 title "Research on technology of mold fabrication by SU-8 photoresist" @default.
- W2347705842 hasPublicationYear "2013" @default.
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