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- W2348143796 abstract "In recent years,nanoimprint lithography has attracted a lot of attention technology because of its advantages of simple operation,high resolution,low cost and high repeatability.This paper mainly introduces the current mainstream nanoimprint technology,and briefly summarizes the current research situation and future directions of nanoimprint technology." @default.
- W2348143796 created "2016-06-24" @default.
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- W2348143796 date "2013-01-01" @default.
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- W2348143796 title "Research progress of the nanoimprint technology" @default.
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